Calibration Furnace
Maintenance
63
Table 7 is a list of Furnace calibration tests and adjustments.
Table 7. Furnace Calibration Tests and Adjustments
No.
Test Name
Test Points (
°
C) Notes
1
Stability Test
300, 700, 1000, 1200
As Found/As Left data to verify the temperature
stability – can be done with other tests at same
nominal setpoints.
2
Axial Uniformity Test
300, 700, 1000, 1200
As Found data – use data for initial uniformity
adjustment
3
Axial Uniformity Adjustment
300, 700, 1000, 1200
Adjust the zone and skew parameters to set axial
uniformity to the specification
4
Axial Uniformity Test
300, 700, 1000, 1200
As Left data to verify the temperature uniformity.
5
Accuracy Test
300, 700, 1000, 1200
As Found test data – use to adjust the accuracy
6
Accuracy Adjustment
300, 700, 1000, 1200
Adjusts the TEMP calibration parameters to set the
accuracy to the specification
7
Accuracy Test
300, 700, 1000, 1200
As Left data to verify the accuracy