finetech FINEPLACER lambda Operator'S Manual Download

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FINEPLACER

lambda

Sub-Micron Bonding System

Operator’s Manual

Finetech GmbH & Co. KG

Boxberger Str. 14

12681 Berlin

S49 (0) 30 93 66 81-350

Fax +49 (0) 30 93 66 81-144

[email protected]

All specifications and characteristics are subject to change without notice.

Summary of Contents for FINEPLACER lambda

Page 1: ...nding System Operator s Manual Finetech GmbH Co KG Boxberger Str 14 12681 Berlin Service 49 0 30 93 66 81 350 Fax 49 0 30 93 66 81 144 service finetech de All specifications and characteristics are su...

Page 2: ...3 3 GENERATION AND CONNECTION OF VACUUM AND COMPRESSED AIR 19 3 3 4 PLACER SUPPORT 19 3 3 5 CAMERA CONTROL AND POWER SUPPLY FOR OPTIONS 19 3 3 6 RS 232 INTERFACE 20 3 3 7 FINETECH MODULE INTERFACE 21...

Page 3: ...NCE 40 6 1 PREVENTIVE MAINTENANCE 40 6 1 1 MAINTENANCE DUTY OF CARE 40 6 1 2 POSITIONING TABLE MAINTENANCE POSITION 40 6 1 3 DAILY 41 6 1 4 MONTHLY 42 6 1 5 EVERY 3 MONTHS 42 6 1 6 YEARLY 43 6 2 CORRE...

Page 4: ...ors and technical changes especially those made on a customer s request For optional modules see also specific manual sections Assured properties must be agreed upon by contract expressly and in writi...

Page 5: ...rt bonding technologies can be performed such as thermocompression ultrasonic thermosonic bonding ACF bonding UV cure and bonding of C4 chips Due to the modular system the necessary configuration may...

Page 6: ...ly into one common image plane using a stationary beam splitter 30 and a single beam deflection see fig 1 Fig 1 Operating principle of A6 A7 sketch of the lateral view right hand side A Observation po...

Page 7: ...GHT ANGLE THAT THE BEAM SPLITTER 30 HAS BEEN ADJUSTED CORRECTLY AS DESCRIBED IN 4 2 3 IT IS NOT NECESSARY TO PERFORM THE ADJUSTMENT PROCEDURE BEFORE EACH WORKING PROCESS BUT TO CHECK IT OCCASIONALLY 2...

Page 8: ...ing the guarantee period equipment that does not work perfectly will be repaired or exchanged free of charge The guarantee only covers the aforementioned FINEPLACER equipment but no consequential dama...

Page 9: ...Electrical Mains Power Be cautious of electrical hazards No wet hands no children no plants and no animals should come into contact with any machine part Always keep the equipment dry No thin or smal...

Page 10: ...terminal FINEPLACER s and their modules conform to EC Directive of Electromagnetic Compatibility EMC Magnetic fields being beyond the limits of the above directive could anyhow influence the function...

Page 11: ...nce the positioning accuracy Because of the high optical magnification required in some cases intensity and beam concentration of the built in illumination equipment may be rather high On installing a...

Page 12: ...QUIPMENT CAN BE DAMAGED ANY DAMAGE DUE TO INSUFFICIENT MEDIA PURITY WILL NOT BE COVERED BY WARRANTY Comply with the special safety conditions given with the descriptions of the modules With the Finete...

Page 13: ...ch 64 and vacuum foot switch as well as cables and hoses Vision modules e g or MIRAGE 37 or side camera with common video monitor Process Modules e g placer arm 27 with positioning head 20 Ultrasonic...

Page 14: ...r level for alignment Alternatively use a spirit level Make sure there is no horizontal tilt The table should always slowly slide away from the operator towards the machine when the air cushion is act...

Page 15: ...may float above the base plate 70 using the micrometer screws 50 and 51 as temporary handles Once coarse positioning is achieved releasing the foot switch will lock the table in the optical axis can b...

Page 16: ...rm 27 The pivot arm may be e g a pivot arm 27 further special arms are available e g FE1 for ultrasonics application chip bonding Pivot arms have their own cables and hoses for energy transportation a...

Page 17: ...ox contains the following basic functional groups 1 mains connection 2 displays and operating elements 3 generation of vacuum for fixing devices and compressed air for the positioning table air cushio...

Page 18: ...t POWER IN contains a fuse which exclusively serves to protect the Placer Control Box but not all the other control boxes connected to the multiple socket Please take care never to exceed the maximum...

Page 19: ...onal Target Finder are connected to the SUB D socket of the Placer Control Box via a 25 pin plug The Target Finder is switched on as long as the foot switch is pressed to move the positioning table wh...

Page 20: ...possesses an RS 232 interface its connector PC RS 232 is in the back panel It can be used for linking the PC to the Placer Control Box allowing modifications of the internal software as well as commu...

Page 21: ...cer Control Box 3 4 1 Switching on Press the POWER switch to activate the Placer Control Box together with all connected modules After each push the POWER switch is disabled for three seconds to avoid...

Page 22: ...panel of the Placer Control Box color green yellow Table 1 gives further explanations TABLE 1 Vacuum Arm LED Pipette LED LED VACUUM STATUS at the arm no component recognized flashing off flashing gre...

Page 23: ...the arm has to be in the vertical position and a component has to be recognized either in the head VACUUM STATUS shines green permanently or in the pipette VACUUM STATUS shines yellow permanently To...

Page 24: ...socket 66 29 Positioning table Holds a substrate a substrate support plate or a heating plate Floats on air cushion above the base plate 70 for coarse positioning 30 Beam splitter optics holder see 4...

Page 25: ...tion changer Switches zooms magnification of the FoV 18 61 Vacuum pipette socket Connects vacuum and pipette switch signal from Placer Control Box 39 to vacuum pipette 24 62 a Mains fuse for Placer Co...

Page 26: ...the side 162 Bonding Force Module Boding device to provide a specific force for the bonding process 163 Balance weight Counter weight 164 Sliding weight Allows to choice the appropriate force by slid...

Page 27: ...uncontrolled in any direction 4 The alignment of the superimposed image of the component as well as the subject may be impaired by any light from the background A dark wall or screen behind the erect...

Page 28: ...the placer head is suitable for the height of your component Custom specified positioning heads are available please ask your dealer Using the screw 21 the placer head 20 must be fixed so that its sh...

Page 29: ...ved freely on the base plate 70 or is fixed in its position by the magnet When the foot switch is released the positioning table lays directly on the base plate without air cushion It should be able t...

Page 30: ...2 3 just focus to the sharpest image on the monitor and proceed to adjustment 2 chapter 4 2 4 see below In case of working with an A6 the whole procedure always consists of two adjustment steps to be...

Page 31: ...the limit stop 2 Clamp the placement plate with nonius into the table Make sure the plate is securely clamped and free of play 3 Place the nonius glass on the placement plate The nonius needs to be pl...

Page 32: ...large magnification Turn off the vacuum on the placer arm using the foot switch Select a low force at the Bonding Force Module Pick up the nonius Adjust the back focus of the nonius in the placement...

Page 33: ...bring the structure into back focus to check the placement accuracy Make a screen shot if the placement accuracy is not within specification Bring back the table into the z height that you made a not...

Page 34: ...Beam Splitter Reproduce the placement error as seen on the screen shot by using the Allen key This compensates the offset placement error at hand Adjust the x offset Adjust the y offset Adjust the non...

Page 35: ...agnification and put the adjustment plate into the focal point use z micrometer screw at positioning table 3 Slide optics into swivel position and switch off the system 4 Remove the 25 pin connector a...

Page 36: ...ap under one or more legs all four legs need to be in contact with the plate 7 For rotating the tool holder around the y axis loosen the fixing screws at the back of the placement arm counter clockwis...

Page 37: ...counter clockwise 12 Use a wrench size 13 mm to rotate the tool holder around the x axis 13 Check the orientation by using the parallelism adjustment tool with a spacer or reflecting light as describ...

Page 38: ...er 3 and of the safety instructions see chapter 2 and that the FINEPLACER has been calibrated and checked out see chapter 4 2 5 1 Adjustable lock position for the manual optics shifting The manual opt...

Page 39: ...pported positioning table 29 and compare the images of component pins and substrate s pads a coarse overlapping can be quickly accomplished The optional Target Finder AC1 helps to make this easier 4 W...

Page 40: ...rce Modules and Optics Shifting Module must be deactivated Make sure no process file is loaded to avoid sudden activation of machine parts 6 1 2 Positioning table maintenance position Remove the heati...

Page 41: ...using the minimum amount of the proper solvent wiping with a bare hand may help you to decide about cleanliness Dust the remaining subassemblies as required Failure to keep the FINEPLACER clean or dam...

Page 42: ...bulbs so as not to affect the positioning accuracy 6 1 4 Monthly Check the in line vacuum filter which is plugged into the head vacuum socket 46 in the back plane of the Placer Control Box The filter...

Page 43: ...before leaving the facility Premature failure is therefore unlikely In case of failure call fax or mail your dealer or the manufacturer Finetech You find the contact address on the first page of this...

Page 44: ...bench may be higher or lower depending on selected video module incl cabling foot switch Placer Control Box W x D x H 290 x 310 x 143 mm 10 kg and Positioning Table Technical Data Sheet for Placer Con...

Page 45: ...ion with a specific frequency Mains Fuse 230V 240V 1 25A slow 100V 120V 2 5A slow Power consumption max 200VA Vacuum generation typical 0 4bar 5 8psi Alternatives Vacuum generation compressed air 6 ba...

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