Installation and commissioning
PlasmaQuant MS product family
34
4.1.4
Exhaust unit
CAUTION
Danger from hazardous gases such as ozone and nitrous gases! Switch on the exhaust
unit prior to igniting the plasma.
The exhaust unit is meant to remove hazardous gases generated during plasma
operation, such as ozone or nitrous gases.
Correct exhaustion requires the connection of flexible ducting from your exhaust
system to the exhaust port on top of the PlasmaQuant MS. The instrument exhaust
outlet has a diameter of 100 mm (4 in). Use an exhaust unit made of heat and
corrosion-resistant material.
Summary 6
Exhaust unit requirements
Parameters
Properties
Material
Heat and corrosion resistant (recommended V2A steel)
Extraction output
3.0 m
3
/min (110 ft
3
/min) – 4.5 m
3
/min (160 ft
3
/min)
recommended value: 3,5 m
3
/min (125 ft
3
/min)
Adapter using flexible aluminum
or plastic pipe
Internal pipe diameter
∅
100 mm (4 in)
Length: up to 5000 mm (15 ft)
Corrosion- und heat-resistant (up to 60 °C)
The exhaust port moves when the interface door is opened during regular
maintenance; therefore, it is not possible to use a rigid duct connection.
4.1.5
Water cooler
NOTICE
The PlasmaQuant MS may be damaged if the maximum cooling water pressure of
500 kPa (72.5 psi) is exceeded.
A water cooling system is needed to circulate water to the induction coils, plasma
interface assembly, RF generator, and both turbo pumps. The recirculating chillers
supplied by Analytik Jena are adapted to the required cooling performance of the
PlasmaQuant MS. If the recirculating chiller is not obtained from Analytik Jena, the
following minimum requirements must be met:
Summary 7
Cooling circuit requirements
Parameters
Properties
Cooling capacity
Minimum of 1.8 kW
Water temperature (water supplied
to the instrument)
20 °C ± 1 °C (68 °F ± 1.8 °F)
Water Pressure
440 ± 40 kPa (64 ± 6 psi)
Pressure at the instrument water inlet