STP-301/451 Series Instruction Manual
9
6.2.1 Operating Environment........................................................................................6-7
6.2.2 Insulation Test.....................................................................................................6-7
6.2.3 Installation Area ..................................................................................................6-8
6.3
Attaching the STP Control Unit Front Panel to a Rack..................................................6-9
6.4 Cable
Connection.......................................................................................................6-10
6.4.1 Name and Dimensions of Each Cable ...............................................................6-10
6.4.2 How to Connect the Cables ..............................................................................6-12
6.5
Connecting to Semiconductor Equipment...................................................................6-14
6.5.1 Connecting to Pow er ........................................................................................6-14
6.5.2 Emergency Off Circuit (EMO Circuit).................................................................6-14
7
How to Start/Stop the STP Pump ................................................ 7-1
7.1 Before
Starting.............................................................................................................7-1
7.2 Start
Procedures..........................................................................................................7-2
7.3 Stop
Procedures ..........................................................................................................7-2
7.4 Manual
Operation.........................................................................................................7-3
7.4.1 Pow ering ON.......................................................................................................7-3
7.4.2 Starting the STP Pump.........................................................................................7-3
7.4.3 Stopping the STP Pump.......................................................................................7-3
7.4.4 Starting the STP Pump after Stopping.................................................................7-4
7.4.5 Pow ering OFF.....................................................................................................7-4
7.4.6 Starting the STP Pump after a Safety Function Operates...................................7-4
7.5
Remote Operation (I/O TB2) .........................................................................................7-5
7.5.1 Pow ering ON.......................................................................................................7-5
7.5.2 Starting/Stopping the STP Pump..........................................................................7-5
7.5.3 Starting the STP Pump After Stopping ................................................................7-6
7.5.4 Pow ering OFF.....................................................................................................7-6
7.5.5 Starting the STP Pump after a Safety Function Operates...................................7-6
7.6
Remote Operation (CON4: Optional Accessory) .........................................................7-7
7.6.1 Pow ering ON.......................................................................................................7-7
7.6.2 Starting/Stopping the STP Pump..........................................................................7-7
7.6.3 Starting the STP Pump After Stopping ................................................................7-8
7.6.4 Pow ering OFF.....................................................................................................7-8
7.6.5 Starting the STP Pump after a Safety Function Operates...................................7-8
8
Remote Input/Output Signal Terminal Blocks.............................. 8-1
8.1
I/O TB1 Terminal Block .................................................................................................8-1
8.2
I/O TB2 Terminal Block .................................................................................................8-5
8.3
CON4 Connector (Optional accessory) .......................................................................8-7
8.3.1 Remote Input Signals...........................................................................................8-7
8.3.2 Remote Output Signals........................................................................................8-9
8.3.3 Remote Cables (Optional Accessories)............................................................8-11
9 Adjustment
Method..................................................................... 9-1
9.1 Tuning ..........................................................................................................................9-1
9.1.1 Tuning Method.....................................................................................................9-1
9.2
Setting the Rated Speed ..............................................................................................9-3
9.2.1 When Setting DSW-B No. 1 to ON under Pow er-ON State.................................9-3
9.2.2 When Setting DSW-B No. 1 to ON before Pow ering On.....................................9-4
