Edwards nRVi, Instruction Manual

Page: 24 / 100

Parameter
Value
Units
nRVi4i nRV6i nRV10i nRV14i
Maximum pumping speed 3.9 6.2 10.0 14.2 m3h-1
Maximum permitted inlet
pressure and gas ballast inlet
pressure
0.5 0.5 0.5 0.5 bar gauge
1.5 x 10
5
1.5 x 10
5
1.5 x 10
5
1.5 x 10
5
Pa
Maximum permitted outlet
pressure
0.2 0.2 0.2 0.2 bar gauge
0.2 x 10
5
0.2 x 10
5
0.2 x 10
5
0.2 x 10
5 Pa
Note:
Total pressures have been measured by a capacitance diaphragm gauge on a vacuum
chamber without a cold trap, as specified by Pneurop Standard 6602 (1979).
Table 6
High vacuum mode performance data
Parameter
Value
Units
nRV4i nRV6i nRV10i nRV14i
Gas ballast control closed
(position ‘0’) ultimate total
pressure
2 x 10
-3
2 x 10
-3
2 x 10
-3
2 x 10
-3 mbar
2 x 10
-1
2 x 10
-1
2 x 10
-1
2 x 10
-1
Pa
Gas ballast control low
flow (position ‘I’) ultimate
total pressure
3 x 10
-2
3 x 10
-2
3 x 10
-2
3 x 10
-2
mbar
3 3 3 3
Pa
Gas ballast flow 5 5 5 5 Litres
Maximum water vapour
pumping rate
0.04 0.04 0.04 0.04
kg h
-1
Maximum water vapour
inlet pressure
18 11 7 5 mbar
1.8 x 10
3
1.1 x 10
3
7 x 10
2
5 x 10
2 Pa
Gas ballast control high
flow (position ‘II’) ultimate
total pressure
1.2 x 10
1
1 x 10
1
6 x 10
-2
6 x 10
-2 mbar
1.2 x 10
1
1 x 10
1
6 6
Pa
Gas ballast flow 14 14 16 16 Litres
Maximum water vapour
pumping rate
0.12 0.12 0.20 0.25
kg h
-1
Maximum water vapour
inlet pressure
54 32 34 28 mbar
5.4 x 10
3
3.2 x 10
3
3.4 x 10
3
2.8 x 10
3
Pa
Table 7
High throughput mode performance data
Parameter
Value
nRV4i nRV6i nRV10i nRV14i
Units
Gas ballast control closed
(position ‘0’) ultimate total
pressure
3 x 10
-2
3 x 10
-2
3 x 10
-2
3 x 10
-2 mbar
0 0 0 0 Pa
Page 20
A65901880_D - Technical data