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DC-ITD-CL4andCL8MAN01.A
www.dodtec.com
NOV 2018
815-788-5200
CL4 & CL8 Manual
6.4 End of line particulate filters
End of line (point of detection) particulate filters which protect the CL4/CL8 from damage are required on all
4/8 points including points not being monitored. Table 6.1 details the type of filter required for each gas
–
see also figure 6.2. Filters must be replaced on a regular basis as shown in the table. Filter orientation is not
critical in either application.
Table 6.1
Gas
Description
Suggested Replacement
DOD Filter Part #
AsH3
Arsine
6 Months
780248
B2H6
Diborane
6 Months
780248
GeH4
Germane
6 Months
780248
H2SE
Hydrogen Selenide
6 Months
780248
PH3
Phosphine
6 Months
780248
SiH4
Silane
6 Months
780248
TBA
Tertiary-Butyl-Arsine
6 Months
780248
H2S
Hydrogen Sulfide
6 Months
780248
HCL
Hydrogen Chloride
1 Month (membrane)
60009 (Housing) 60010 (membrane)
OR
2-800-013
HF
Hydrogen Fluoride
1 Month (membrane)
60009 (Housing) 60010 (membrane)
OR
2-800-013
BF3
Boron Trifluoride
1 Month (membrane)
60009 (Housing) 60010 (membrane)
OR
2-800-013
HBR
Hydrogen Bromide
1 Month (membrane)
60009 (Housing) 60010 (membrane)
OR
2-800-013
COCL2
Phosgene
6 Months
780248
IMPORTANT:
All points require filtration to prevent dust accumulation in tubing and
internal damage to the CL4/CL8. Dust that collects in the tubing or the internal
system may cause sample loss and inaccurate gas concentration readings.