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CKD Rapiflow FSM2 Series, Instruction Manual

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CKD Rapiflow FSM2 Series Instruction Manual Download Page 63

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62

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PRODUCTS

４

[SM-385853-A] 

４．４ 

Internal structure   

  ４．４．１ 

Resin body (Integrated indicator type) Port size: f6 push-in 

４．４．２

  Stainless body

（

Separated indicator type

）

Port size:Rc1/4

No.  Parts name 

Material 

No. 

Parts name 

Material 

①

 

Front sheet 

Polyethylene film 

⑧

 

Spacer 

Stainless steel 

②

 

Case   

ABS resin 

⑨

 

Port filter 

Stainless steel 

③

 

Electron circuit board 

- 

⑩

 

Rectification plate 

Stainless steel 

④

 

Module holder 

PPS resin 

⑪

 

Sensor chip 

Semiconductor chips 

⑤

 

C ring 

Stainless steel 

⑫

 

Stainless steel body 

Stainless steel 

⑥

 

O-ring holder 

Stainless steel 

⑬

 

Sensor gasket 

Fluoro rubber 

⑦

 

O-ring 

Fluoro rubber 

⑭

 

Sensor base 

Alumina 

No.  Parts name 

Material 

No. 

Parts name 

Material 

①

 

Liquid crystal cover 

Acryl resin 

⑧

 

Resin body 

Polyamide resin 

②

 

Liquid crystal 

- 

⑨

 

Sensor chip 

Semiconductor chips 

③

 

Switch 

Ethylene propylene rubber

⑩

 

Rectification plate 

Stainless steel 

④

 

Base spacer 

Polycarbonate resin 

⑪

 

Port filter 

Stainless steel 

⑤

 

Module holder 

PPS resin 

⑫

 

Sensor base 

Alumina 

⑥

 

Push-in fitting 

- 

⑬

 

Electron circuit board 

- 

⑦

 

Sensor gasket 

Fluoro rubber 

⑭

 

Case   

ABS resin 

① 

② 

③ 

④ 

⑤ 

⑥ 

⑪ 

⑨ 

⑩ 

⑦ 

⑫ 

⑬ 

⑧ 

⑭ 

① 

② 

③ 

④ 

⑤ 

⑬ 

⑭ 

⑥ 

⑪ 

⑨ 

⑩ 

⑦ 

⑧ 

⑫ 

Discontinue

Summary of Contents for Rapiflow FSM2 Series

Page 1: ...before using this product particularly the section describing safety Retain this instruction manual with the product for further consultation whenever necessary 2nd EDITION Integrated indicator type F...

Page 2: ...safety of device design and control etc ISO 4414 JIS B 8370 pneumatic system rules JPAS 005 policy for pneumatic cylinder use and selection High Pressure Gas Maintenance Laws Occupational Safety and S...

Page 3: ...er to prevent the powder from entering the sensor When using the valve with liquified gases such as carbon dioxide always vaporize the gas Faults could result if the liquified gas enters this product...

Page 4: ...data 5 1How to select flow sensor When this product is used to confirm suction etc provide an air filter upstream from suction to prevent the entry of foreign matter When this product is used to confi...

Page 5: ...he pipes The rectifier or sensor chip could be damaged if an entry of a large amount of foreign matter cutting chips etc occurs Attach a wrench to metal sections when tightening pipes so that pressure...

Page 6: ...needle valve is not completely free of dust generation A final clean filter should be used in circuits where dust generation could be a problem Do not turn the dial forcibly when fully closing or open...

Page 7: ...re and during work Connect and wire bending resistant material such as robot wire material for movable sections Do not use this product at levels exceeding the power supply voltage range If voltage ex...

Page 8: ...lems This product uses a micro sensor chip and must be installed where it will not be subject to dropping impact or vibration Handle this product as a precision component during installation and trans...

Page 9: ...use damage depending on where the surge absorbing element is installed Main circuit ON PLC PLC output Flow sensor Surge absorbing element Later installation Circuit shutdown by disconnection or emerge...

Page 10: ...or chip Use conditions for CE compliance This product is CE marked indicating conformity with the EMC Directives The standard for the immunity for industrial environments applied to this product is EN...

Page 11: ...oint verification method 21 2 3 4 Key lock Key unlock function 21 2 4 Standard setting mode 22 2 4 1 How to enter to standard setting mode 22 2 4 2 Setting of switch output function 23 2 4 3 Switch ou...

Page 12: ...arated indicator type FSM2 A series 49 4 3 3 Integrated indicator type with bracket 52 4 3 4 Separated indicator type with bracket 53 4 3 5 Integrated indicator type Integrated needle valve type 55 4...

Page 13: ...cessive screw in and load torques to the port When piping apply a spanner on the metal section not to apply forces onto the resin section Reference value Set screw Tightening torque N m M5 1 0 to 1 5...

Page 14: ...ight or left The tightening torque for screws should be 0 5N m Bracket separate sales Model no FSM2 LB1 Port size Push in joint 4 6 8 10 Rc1 8 Rc1 4 M5 Bracket separate sales Model no FSM2 LB2 Port si...

Page 15: ...5853 A 14 INSTALLATION Panel mount Model no FSM2 KHS N needle valve type Model no FSM2 KHS Push in joint type Port size Rc1 8 Rc1 4 M5type Note It is not possible to use it for A15 of port size Discon...

Page 16: ...og output Blue Power supply Analog voltage output R approx 1k Analog current output R approx 100 Pin No Line color Content 1 Brown Power supply voltage output 12 to 24 V current output 24 V 2 Black CH...

Page 17: ...ite CH2 Input 2 3 4 5 1 CH2 function selected switch output CH2 function selected external input Analog voltage output R approx 1k Analog current output R approx 100 Pin No Line color Content 1 Brown...

Page 18: ...voltage output 12 to 24 V current output 24 V 2 Black Analog output Voltage output 1 to 5 V Load impedance 50 k and over Current output 4 to 20 A Load impedance 300 or less 3 White N C model identifi...

Page 19: ...maximum value When selecting a mode Sets the mode When setting each data Increases the value etc Down key When flow rate is displayed Displays the CH2 data During peak hold operation Displays the max...

Page 20: ...tion selection Only bi directional type flow direction can be switched Bi direction CH2 function selection Sets the CH2 function Selects Switch output External input of auto reference or External inpu...

Page 21: ...while holding the peak Display unit selection Instantaneous flow rate display unit mL min L min Integrated display unit mL L Instantaneous flow rate display Press once Press once setting Integrated d...

Page 22: ...oreover when other operations are done Loc is displayed while locking the key CH1 data display Instantaneous flow rate display Being held down To Instantaneous flow rate display Separate CH2 data disp...

Page 23: ...ss once 0 point adjustment Press once To Instantaneous flow rate display To switch output setting display Press once determination To forcible output setting display Press once determination To 0 poin...

Page 24: ...FF data setting set point set point Count up Count down Press onse Press once determination CH2 operation mode change Set same as CH1 CH2 ON OFF data setting Set same as CH1 Press once determination P...

Page 25: ...On when higher than set integration The switch turns ON at the set integrated flow 7 Integrated output 2 Off when higher than set integration The switch turns OFF at the set integrated flow 8 Integrat...

Page 26: ...by the operation processing value from an actual flowing quantity value Forcible output setting display To Instantaneous flow rate display Press once 0 point adjustment setting display To Instantaneo...

Page 27: ...splayed color setting display Press once determination Press once Hysteresis fixed value selection To hysteresis fixed value Press once determination Press once Unit selection To flow rate unit settin...

Page 28: ...erse The arrow changes according to flow direction When reverse flow is indicated L min Analog output F S flow rate 0 F S flow rate 5 20 3 12 1 4 V mA L min Analog output 0 F S flow rate 5 20 3 12 1 4...

Page 29: ...egrated reset Auto reference To instantaneous flow rate display Press once determination To setting of CH2 switch output Press once determination Press once determination Setting of CH2 function Refer...

Page 30: ...urned on keep approx 40msec 2 points input The set point takes the flow rate when external input is turned on keep approx 40msec The big and small relations between latest two points are compared uppe...

Page 31: ...than centre value of two input points Set point 2 point input 2 Flow rate small side ON OFF when higher than centre value of two input points Set point 2 point inside Range inside ON ON when flow rate...

Page 32: ...time setting display Setting of response time Symbol Response time SP 1 50msec SP 2 80msec SP 3 120msec SP 4 200msec SP 5 400msec SP 6 800msec SP 7 1500msec To Instantaneous flow rate display Press o...

Page 33: ...ress once determination Press or key to select sub display Press key to set Press or key to select display color Press key to set Display color setting display Setting of display color To Instantaneou...

Page 34: ...ondition Note NOR display is calculation value When the factory is shipped the adjustment inspection is done with ANR Hysteresis fixed value setting Hysteresis fixed value selection To Instantaneous f...

Page 35: ...isplay Reset is not executed Reset is executed Setting at shipping out of factory Item Setting at shipping out of factory Switch out put OFF Zero adjustment value Zero Integrating flow rate value Zero...

Page 36: ...rate display Press once Flow rate unit flow direction 0 point adjustment value Model number Full scale flow rate Working fluid Ai Air N2 Ar Argon C2 Carbon dioxide Switch output N NPN Output P PNP Out...

Page 37: ...r Switch output indi cator is blinking Switch output over current protection circuit is activated Check whether load current exceeds the rating cor rectly connect the controller and turn power ON agai...

Page 38: ...on caused by noise Keep FSM2 main body and cable away from the noise source Poor precision Sensor chip is broken Replace FSM2 Foreign matter sticking to sensor chip Replace FSM2 Malfunction caused by...

Page 39: ...to 2 0 0 L m in 5 0 0 to 5 0 0 L m in 1 0 0 0 to 1 0 0 0 L m in 2 0 0 to 2 0 0 L m in 5 0 0 to 5 0 0 L m in 1 0 0 0 to 1 0 0 0 L m in 2 0 0 to 2 0 0 L m in 5 0 0 to 5 0 0 L m in 1 0 0 0 to 1 0 0 0 L...

Page 40: ...nly air and nitrogen gas SM5 M5 stainless steel custom order product Not for carbon dioxide Flow rate display Note 1 2 Type of display 4 digit 4 digit 2 color LCD Display range 3 F 0 to 500 mL min 0 t...

Page 41: ...ype resin aluminum body FSM2 A 1 2 3 4 5 Full scale flow rate 005 010 020 050 100 200 500 101 201 501 102 Flow rate range Note 1 3 005 500mL min 010 1L min 020 2L min 050 5L min 100 10L min 200 20 L m...

Page 42: ...4 5 6 Full scale flow rate 005 010 020 050 100 200 500 101 201 Flow rate range Note 1 3 005 500mL min 010 1L min 020 2L min 050 5L min 100 10L min 200 20 L min 500 50 L min 101 100 L min 201 200 L mi...

Page 43: ...e a d w ire 3 7 A W G 2 6 o r e q u iva le n t 5 c o n d u c to rs c o n n ec to r c o n n e c tio n in s u la to r O D 1 0 H o ld in g fun c tio n F lo w ra te d is p la y flo w ra te d isp la y p e...

Page 44: ...r L C D F lo w ra te ra n ge 3 F 0 to 5 00 mL min 0 to 1 0 0 0 mL min 0 to 2 0 0 L m in 0 to 5 0 0 L m in 0 to 1 0 0 0 L m in 0 to 2 0 0 L m in 0 to 5 0 0 L m in 0 to 1 00 0 L m in 0 to 2 00 L m in D...

Page 45: ...ceability certificate system diagram and inspection results H08 8 push in resin C2 Carbon dioxide 3 3m H10 10 push in resin P Panel mounting kit S06 Rc1 8 stainless S08 Rc1 4 stainless K With company...

Page 46: ...nductor cable 1 m for display integrated type C53 5 conductor cable 3 m for display integrated type C41 4 conductor cable 1 m for display separate type C43 4 conductor cable 3 m for display separate t...

Page 47: ...00 500 FSM2 N P H08 H10 Flow range 500 101 201 Model No Port size Dimension A FSM2 H04 4 push in 64 9 FSM2 H06 6 push in 67 2 Model No Port size Dimension A FSM2 H08 8 push in 70 6 FSM2 H10 10 push in...

Page 48: ...PRODUCTS SM 385853 A FSM2 N P S06 SM5 Flow range 005 010 020 050 100 200 500 FSM2 N P S08 Flow range 500 101 201 2 3 4 penetrating Rc1 8 or M5 2 M3 depth5 2 3 4 penetrating 2 M3 depth5 55 15 Disconti...

Page 49: ...48 PRODUCTS SM 385853 A FSM2 N P A15 Flow range 501 102 2 M3 depth5 Discontinue...

Page 50: ...00 FSM2 A H08 H10 Flow range 500 101 201 Model No Port size Dimension A FSM2 H04 4 push in 64 9 FSM2 H06 6 push in 67 2 2 3 4 penetrating 4 or 6 push in joint 2 M3 depth5 Model No Port size Dimension...

Page 51: ...50 PRODUCTS SM 385853 A FSM2 A S06 SM5 Flow range 005 010 020 050 100 200 500 FSM2 A S08 Flow range 500 101 201 2 3 4 penetrating Rc1 8 or M5 2 M3 depth5 2 3 4 penetrating 2 M3 depth5 Discontinue...

Page 52: ...51 PRODUCTS SM 385853 A FSM2 A A15 Flow range 501 102 2 M3 depth5 Discontinue...

Page 53: ...52 PRODUCTS SM 385853 A Integrated indicator type with bracket FSM2 N P H04 H06 S06 SM5 B Flow range 005 010 020 050 100 200 500 FSM2 N P H08 H10 S08 B Flow range 500 101 201 Discontinue...

Page 54: ...53 PRODUCTS SM 385853 A FSM2 N P A15 B Flow range 501 102 Separated indicator type with bracket FSM2 A H04 H06 S06 SM5 B Flow range 005 010 020 050 100 200 500 Discontinue...

Page 55: ...54 PRODUCTS SM 385853 A FSM2 A H08 H10 S08 B Flow range 500 101 201 FSM2 A A15 B Flow range 501 102 Discontinue...

Page 56: ...H06 N Flow range 005 010 020 050 100 200 500 FSM2 N P H08 H10 N Flow range 500 101 201 Model No Port size Dimension A FSM2 H04 N 4 push in 89 9 FSM2 H06 N 6 push in 92 2 Model No Port size Dimension...

Page 57: ...56 PRODUCTS SM 385853 A FSM2 N P S06 N Flow range 005 010 020 050 100 200 500 FSM2 N P S08 N Flow range 500 101 201 2 M3 depth5 2 M3 depth5 Discontinue...

Page 58: ...DUCTS SM 385853 A Integrated indicator type Integrated needle valve type with bracket FSM2 N P H04 H06 S06 BN Flow range 005 010 020 050 100 200 500 FSM2 N P H08 H10 S08 BN Flow range 500 101 201 Disc...

Page 59: ...58 PRODUCTS SM 385853 A Bracket FSM2 LB1 FSM2 005 010 020 050 100 200 500 101 201 FSM2 LB2 FSM2 501 102 Discontinue...

Page 60: ...5853 A Cable option FSM2 C51 C53 Integrated indicator type FSM2 C41 C43 Separated indicator type Model No Dimension L FSM2 C51 1040 20 FSM2 C53 3040 20 Model No Dimension L FSM2 C41 1040 20 FSM2 C43 3...

Page 61: ...ator type Integrated needle valve type Model No Dimension A Dimension B FSM2 H04 H06 S06 SM5 40 5 28 5 FSM2 H08 H10 S08 46 5 30 0 A B Model No Dimension A Dimension B FSM2 H04 H06 S06 N 40 5 28 5 FSM2...

Page 62: ...ntegrated indicator type Single mount Sticking mount n Number of sticking installations Integrated needle valve type Single mount Sticking mount n Number of sticking installations 57 5 0 5 22 5 0 5 57...

Page 63: ...miconductor chips C ring Stainless steel Stainless steel body Stainless steel O ring holder Stainless steel Sensor gasket Fluoro rubber O ring Fluoro rubber Sensor base Alumina No Parts name Material...

Page 64: ...er film Spacer Aluminum alloy Case ABS resin Port filter Stainless steel Electron circuit board Rectification plate Stainless steel Module holder PPS resin Sensor chip Semiconductor chips C ring Stain...

Page 65: ...r Fixing pin Stainless steel Orifice Brass nickeling O ring Fluoro rubber Fitting fixing pin Stainless steel O ring Fluoro rubber O ring Fluoro rubber Cartridge fitting No Parts Name Material No Parts...

Page 66: ...0 Velocity 0 139 0 554 1 247 2 217 3 464 6 789 13 856 31 175 55 423 0 1813 0 08 0 1013 0 Velocity 0 160 0 640 1 440 2 560 4 000 7 840 15 999 35 998 63 996 0 2013 0 1 0 1013 0 Acoustic 0 179 0 716 1 6...

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