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43
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PRODUCTS
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[SM-385853-A]
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Integrated needle valve type (Stainless steel body)
Note 1 : The value converted to volumetric flow rate at standard condition (20°C 1 barometric pressure (101 kPa) relative humidity 65%)
Note 2 : The flow rate display is rounded off at approx. ±1% F.S. or less (forced zero).
Note 3 : The integrated flow rate is a calculated (reference value). It will be reset when the power is turned OFF.
Note 4 : Use dry air which does not contain corrosive elements such as chlorine, sulphur or acids, and which is clean and does not contain dust or oil mist. When
using compressed air, use clean air that complies to JIS B 8392-1:2012 (ISO 8573-1:2010) Class [1:1:1 to 1:6:2] Compressed air from the compressor
contains drainage-water, oiloxide, foreign substances, etc. To maintain the function of this product, so install a filter, air dryer (min. pressure dew point
10 C or less), and oil mist filter (max. oil content 0.1 mg/m
3
) on the primary side (upper stream side) of this product.
Note 5 : Calibration of this product is performed within specified range. Accuracy conditions: Temperature 25±3 C, power supply voltage 24±0.01 VDC. F.S.
stands for full scale flow rate.
Note 6 : Response time can be set in seven steps from 50 ms. or less to approx. 1.5 s.
Note 7 : The output impedance of the analog output section is approx. 1 k . If the impedance of the connecting load is small, output and error increase.
Check error with the impedance of the connecting load before using.
Note 8 : The power supply voltage specifications differ for the voltage output type and current output type.
Note 9 : Current for when 24 VDC is connected, and no load is connected. The current consumption will vary depending on how the load is connected.
Note 10 : This product’s protection circuit is effective only for specific mis-connections and a load short-circuit. It does not provide protection against various
mis-connections.
Note 11 : <P70> Dust generation preventing (product surface is decreased and cleaned before packaging. Heat sealed into anti-static bag in clean bench (Class
1000 and over).)
Note 12 : <P80> Oil free (In addition to P70 specifications, gas contact sections are degreased and washed. Refer to the “Internal structure drawing and parts
list” for details on the wetted section members.)
M o d e l n o .
D e s c rip tio n s
N e e d le v a lv e in te g ra te d ty p e (Sta in le s s s te e l b o d y)
F S M 2 -[* 1 ][*2 ][* 3 ][*4 ]-[*5 ][*6 ][ ]N -[*7 ]
F u ll s c a le flo w ra te
0 0 5
0 1 0
0 2 0
0 5 0
1 0 0
2 0 0
5 0 0
1 0 1
2 0 1
F lo w ra te
ra n g e
N o te 1
*4
0 0 5
5 0 0 m L /m in
●
0 1 0
1 L /m in
●
0 2 0
2 L /m in
●
0 5 0
5 L /m in
●
1 0 0
1 0 L /m in
●
2 0 0
2 0 L /m in
●
5 0 0
5 0 L /m in
●
1 0 1
1 0 0 L /m in
●
2 0 1
2 0 0 L /m in
●
P o e t s iz e /
B o d y
m a te ria l
*5
S 0 6
R c 1 /8 / S ta in le s s
●
●
●
●
●
●
●
(N o t fo r
c a rb o n
d io xid e )
S 0 8
R c 1 /4 / S ta in le s s
●
●
●
O n ly a ir a n d
n itro g e n g a s
F lo w ra te d is p la y
N o te 1 ,2
Ty p e o f d is p la y
4 d ig it + 4 d ig it 2 c o lo r L C D
F lo w
ra te
ra n g e
*3
F
0 to
5 0 0
mL/min
0 to
1 0 0 0
mL/min
0 to
2 .0 0
L /m in
0 to
5 .0 0
L /m in
0 to
1 0 .0 0
L /m in
0 to
2 0 .0
L /m in
0 to
5 0 .0
L /m in
0 to
1 0 0 .0
L /m in
0 to
2 0 0
L /m in
D is p la y re s o lu tio n
1 m L /m in
0 .0 1 L /m in
0 .1 L /m in
1 L /m in
In te g ra tin g fu n c tio n s
N o te 3
F lo w ra te ra n g e
9 9 9 9 9 9 9 m L
9 9 9 9 9 .9 9 L
9 9 9 9 9 9 .9 L
9 9 9 9 9 9 9 L
D is p la y re s o lu tio n
1 m L
0 .0 1 L
0 .1 L
1 L
In te g ra tin g p u ls e o u tp u t r a te
5 m L
1 0 m L
0 .0 2 L
5 m L
1 0 m L
0 .0 2 L
5 m L
1 0 m L
2 L
W
or
ki
n
g
c
on
di
tio
n
s
W o rk in g flu id
N o te 4
*6
B la n k
C le a n a ir
(
J IS B 8 3 9 2 -1 :2 0 1 2 (IS O 8 5 7 3 -1 :2 0 1 0 )[1 :1 :1 to 5 :6 :2 ]),
c o m p re s s e d a ir
(
J IS B 8 3 9 2 -1 :2 0 1 2 (IS O 8 5 7 3 -1 :2 0 1 0 )[1 :1 :1 to 1 :6 :2 ]), n itro g e n g a s
A R
A rg o n
C 2
C a rb o n d io xid e
M a xim u m w o rk in g p re s s u re
1 .0 M P a
M in im u m w o rk in g p re s s u re
-0 .0 9 M P a
P ro o f p re s s u re
1 .5 M P a
O p e ra tin g a m b ie n t te m p e ra tu re /h u m id ity
0 to 5 0 °C , 9 0 % R H o r le s s
F lu id te m p e ra tu re
0 to 5 0 ° C (n o d e w c o n d e n s a tio n )
A
cc
ur
a
cy
S p e c ifie d ra n g e
U n i-d ire c tio n ty p e : 3 to 1 0 0 % F .S ., 3 to 1 0 0 % F .S .
L in e a rity (d is p la y / a n a lo g o u tp u t)
W ith in ± 3 % F .S . (S e c o n d a ry s id e re le a s e d to a tm o s p h e re )
P re s s u re c h a ra c te ris tic s
W ith in ± 5 % F .S . (-0 . 0 9 to 0 .7 M P a , s e c o n d a ry s id e re le a s e d to a tm o s p h e re re fe re n c e )
Te m p e ra tu re c h a ra c te ristic s
W ith in ± 0 .2 % F .S ./°C (1 5 to 3 5 ° C , 2 5 ° C re fe re n c e )
N o te 5
R e p e a ta b ility
W ith in ± 1 % F .S .
R e s p o n s e tim e
N o te 6
5 0 m s o r le s s
O
u
tp
ut
S w itc h o u tp u t
* 1
N
O u tp u t 2 p o in ts (N P N o p e n c o lle c to r o u tp u t, 5 0 m A o r le s s , v o lta g e d ro p 2 .4 V o r le s s )
P
O u tp u t 2 p o in ts (P N P o p e n c o lle c to r o u tp u t, 5 0 m A o r le s s , v o lta g e d ro p 2 .4 V o r le s s )
A n a lo g o u tp u t
*2
V
1 to 5 V v o lta g e o u tp u t 1 p o in t (c o n n e c tin g lo a d im p e d a n c e 5 0 k a n d o v e r)
N o te 7
A
4 to 2 0 m A c u rre n t o u tp u t 1 p o in t (c o n n e c tin g lo a d im p e d a n c e 0 to 3 0 0 )
P o w e r s u p p ly v o lta g e
N o te 8
*2
V
1 2 to 2 4 V D C (1 0 .8 to 2 6 .4 V )
A
2 4 V D C (2 1 .6 to 2 6 .4 V )
C u rre n t c o n s u m p tio n
N o te 9
5 0 m A o r le s s
L e a d w ire
3 .7 , A W G 2 6 o r e q u iv a le n t × 5 -c o n d u c to rs (c o n n e c to r c o n n e c tio n ), in s u la to r O . D . 1 .0
H o ld in g fu n c tio n
F lo w ra te d is p la y , flo w ra te d is p la y p e a k h o ld , s w itc h o u tp u t, a n a lo g o u tp u t, e tc .
M o u n tin g o rie n ta tio n
U n re s tric te d in ve rtica l/h o riz o n ta l d ire c tio n
S tra ig h t p ip in g s e c tio n
N o t re q u ire d
D e g re e o f p ro te c tio n
IE C s ta n d a rd s IP 4 0 o r e q u iv a le n t
P ro te c tio n c irc u it
N o te 1 0
P o w e r re v e rs e c o n n e c tio n p ro te c tio n , s w itc h o u tp u t re v e rs e c o n n e c tio n p ro te c tio n ,
s w itc h o u tp u t lo a d s h o rt-c irc u it p ro te c tio n
E M C D ire c tiv e
E N 5 5 0 1 1 , E N 6 1 0 0 0 -6 -2 , E N 6 1 0 0 0 -4 -2 /3 /4 /6 /8
W e ig h t
(m a in b o d y o n ly )
*5
S 0 6
A p p ro x . 1 6 0 g
S 0 8
A p p ro x. 2 0 0 g
C le a n ro o m s p e c ific a tio n s
*7
B la n k
A b s e n c e
P 7 0
D u s t g e n e ra tio n p re v e n tin g
N o te 11
P 8 0
O il fre e
N o te 1 2
Discontinue
