[SM-385853-A]
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36
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MAINTENANC
３
３．
MAINTENANCE
３．１
Error displays and corrective action
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Integrated indicator type
●
Separated indicator type
Error indication
Cause
Corrective action
If fluid flows during zero ad-
justment setting, “E 02” is
indicated.
Please check that fluid doesn’t flow at the time of zero
adjustment setting.
An error occurred during
EEPROM reading or writing.
Replace FSM2.
Contact your nearest CKD Sales Office or dealer.
An error occurred during
memory reading or writing.
Replace FSM2.
Contact your nearest CKD Sales Office or dealer.
Reading exceeds the upper
limit of detection range.
Reduce the flow.
Sensor chip is broken.
Replace FSM2.
Contact your nearest CKD Sales Office or dealer.
Reading exceeds the lower
limit of detection range.
Reduce the flow.
Sensor chip is broken.
Replace FSM2.
Contact your nearest CKD Sales Office or dealer.
Switch output indi-
cator is blinking
Switch output over current
protection circuit is activated.
Check whether load current exceeds the rating, cor-
rectly connect the controller, and turn power ON
again.
Error indication
Cause
Corrective action
The third from the left blinks.
An error occurred during
EEPROM reading or writing.
Replace FSM2.
Contact your nearest CKD Sales Office
or dealer.
The fourth from the left blinks.
An error occurred during
memory reading or writing.
Replace FSM2.
Contact your nearest CKD Sales Office
or dealer.
<One-direction>
Blinking of all
<Bi-directional>
Half the left blinking
Reading exceeds the upper
limit of detection range.
Reduce the flow.
Contact your nearest CKD Sales Office
or dealer.
Sensor chip is broken.
Replace FSM2.
Contact your nearest CKD Sales Office
or dealer.
<One-direction>
The leftmost blinking
<Bi-directional>
Half the left blinking
Reading exceeds the lower
limit of detection range.
Reduce the flow.
Sensor chip is broken.
Replace FSM2.
Contact your nearest CKD Sales Office
or dealer.
Discontinue
