CKD Rapiflow FSM2 Series, Instruction Manual

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39
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PRODUCTS
４
[SM-385853-A]
● Integrated indicator type (Stainless steel body)
Note 1 : The value converted to volumetric flow rate at standard condition (20°C 1 barometric pressure (101 kPa) relative humidity 65%)
Note 2 : The flow rate display is rounded off at approx. ±1% F.S. or less (forced zero).
Note 3 : The integrated flow rate is a calculated (reference value). It will be reset when the power is turned OFF.
Note 4 : Use dry air which does not contain corrosive elements such as chlorine, sulphur or acids, and which is clean and does not contain dust or oil mist. When
using compressed air, use clean air that complies to JIS B 8392-1:2012 (ISO 8573-1:2010) Class [1:1:1 to 1:6:2] Compressed air from the compressor
contains drainage-water, oiloxide, foreign substances, etc. To maintain the function of this product, so install a filter, air dryer (min. pressure dew point
10 C or less), and oil mist filter (max. oil content 0.1 mg/m
3
) on the primary side (upper stream side) of this product.
Note 5 : Calibration of this product is performed within specified range. Accuracy conditions: Temperature 25±3 C, power supply voltage 24±0.01 VDC. F.S.
stands for full scale flow rate.
Note 6 : Response time can be set in seven steps from 50 ms. or less to approx. 1.5 s.
Note 7 : The output impedance of the analog output section is approx. 1 k . If the impedance of the connecting load is small, output and error increase.
Check error with the impedance of the connecting load before using.
Note 8 : The power supply voltage specifications differ for the voltage output type and current output type.
Note 9 : Current for when 24 VDC is connected, and no load is connected. The current consumption will vary depending on how the load is connected.
Note 10 : This product’s protection circuit is effective only for specific mis-connections and a load short-circuit. It does not provide protection against various
mis-connections.
Note 11 : <P70> Dust generation preventing (product surface is decreased and cleaned before packaging. Heat sealed into anti-static bag in clean bench (Class
1000 and over).)
Note 12 : <P80> Oil free (In addition to P70 specifications, gas contact sections are degreased and washed. Refer to the “Internal structure drawing and parts
list” for details on the wetted section members.)
Model no.
Descriptions
Display integrated type (stainless steel body)
FSM2-[*1][*2][*3][*4]-[*5][*6][ ]-[*7]
Full scale flow rate 005 010 020 050 100 200 500 101 201
Flow rate
range
Note 1
*4
005 500mL/min
●
010 1L/min
●
020 2L/min ●
050 5L/min
●
100 10L/min
●
200 20 L/min ●
500 50 L/min
●
101 100 L/min
●
201 200 L/min ●
Poet size/
Body
material
*5
S06 Rc1/8 stainless steel
● ● ● ● ● ●
●
(Not for
carbon
dioxide)
S08 Rc1/4 stainless steel
● ●
●
Only air and
nitrogen gas
SM5
M5 stainless steel
(custom order product)
● ● ● ● ●
●
(N ot for
carbon
dioxide)
Flow rate display
N ote 1,2
Type of display 4 digit + 4 digit 2 color LCD
Display
range
*3
F
0 to
500
mL/min
0 to
1000
mL/min
0 to
2.00
L/min
0 to
5.00
L/min
0 to
10.00
L/min
0 to
20.0
L/min
0 to
50.0
L/m in
0 to
100.0
L/min
0 to
200
L/min
R
-500
to
500
mL/min
-1000
to
1000
mL/min
-2.00
to
2.00
L/min
-5.00
to
5.00
L/min
-10.00
to
10.00
L/min
-20.0
to
20.0
L/min
-50.0
to
50.0
L/m in
-100.0
to
100.0
L/min
-200
to
200
L/min
Display resolution 1mL/min 0.01L/min 0.1L/min 1mL/min
Integrating functions
Note 3
Display range 9999999mL 99999.99L 999999.9L 9999999mL
Display resolution 1mL 0.01L 0.1L 1mL
Integrating pulse output rate
5mL 10m L 0.02L 5mL 10mL 0.02L 5mL 10mL 2L
W
or
ki
ng
c
on
di
tio
ns
W orking fluid
Note 4
*6
Blank
Clean air
(
JIS B 8392-1:2012(ISO 8573-1:2010)[1:1:1 to 5:6:2]),
com pressed air
(
JIS B 8392-1:2012(ISO 8573-1:2010)[1:1:1 to 1:6:2]), nitrogen gas
AR Argon
C2 Carbon dioxide
Maximum working pressure 1.0MPa
Minimum working pressure -0.09MPa
Proof pressure 1.5MPa
Operating am bient tem perature/hum idity
0 to 50°C , 90%RH or less
Fluid temperature 0 to 50°C (no dew condensation)
A
ccu
ra
cy
Specified range
U ni-direction type: 3 to 100% F.S., bi-direction type: -100 to -3% F.S., 3 to 100% F.S.
Linearity (display / analog output) W ithin ±3%F.S. (Secondary side released to atmosphere)
Pressure characteristics W ithin ±5% F.S. (-0.09 to 0.7 MPa, secondary side released to atm osphere reference)
Temperature characteristics W ithin ±0.2%F.S./°C (15 to 35°C, 25°C reference)
N ote 5
Repeatability W ithin ±1% F.S.
Response time
N ote 6
50 ms or less
O
ut
pu
t
Switch output *1
N
Output 2 points (NPN open collector output, 50 m A or less, voltage drop 2.4 V or less)
P
Output 2 points (PNP open collector output, 50 m A or less, voltage drop 2.4 V or less)
Analog output *2
V 1 to 5 V voltage output 1 point (connecting load im pedance 50 k and over)
Note
7
A 4 to 20 m A current output 1 point (connecting load im pedance 0 to 300 )
Power supply voltage
Note 8
*2
V 12 to 24 VDC (10.8 to 26.4 V)
A 24 VDC (21.6 to 26.4 V)
Current consumption
Note 9
50mA or less
Lead wire
3.7, AW G26 or equivalent × 5-conductors (connector connection), insulator O. D. 1.0
Holding function Flow rate display, flow rate display peak hold, switch output, analog output, etc.
Mounting orientation Unrestricted in vertical/horizontal direction
Straight piping section Not required
Degree of protection IEC standards IP40 or equivalent
Protection circuit
Note 10
Power reverse connection protection, switch output reverse connection protection,
switch output load short-circuit protection
EMC Directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
W eight
(main body only)
*5
S06 Approx. 95g
S08 Approx. 115g
SM5 Approx. 140g
Clean room specifications *7
Blank Absence
P70 Dust generation preventing
Note 11
P80 Oil free
Note 12
Discontinue