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41
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PRODUCTS
４
[SM-385853-A]
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Separated indicator type (Stainless steel body)
Note 1 : The value converted to volumetric flow rate at standard condition (20°C 1 barometric pressure (101 kPa) relative humidity 65%)
Note 2 : Use dry gas which does not contain corrosive elements such as chlorine, sulphur or acids, and which is clean and does not contain dust or oil mist.
When using compressed air, use clean air that complies to JIS B 8392-1:2012 (ISO 8573-1:2010) Class [1:1:1 to 1:6:2] Compressed air from the
compressor contains drainage-water, oil oxide, foreign matters, etc. To maintain the function of this product, so install a filter, air dryer (min. pressure
dew point 10 C or less), and oil mist filter (max. oil concentration 0.1 mg/m
3
) on the primary side (upper stream side) of this product.
Note 3 : Calibration of this product is performed within specified range. Accuracy conditions: Temperature 25±3 C, power supply voltage 24±0.01 VDC. F.S.
stands for full scale flow rate.
Note 4 : The output impedance of the analog output section is approx. 1 k . If the impedance of the connecting load is small, output and error increase. Check
error with the impedance of the connecting load before using.
Note 5 : The power supply voltage specifications differ for the voltage output type and current output type.
Note 6 : Current for when 24 VDC is connected, and no load is connected. The current consumption will vary depending on how the load is connected.
Note 7 : This product's protection circuit is effective only for specific misconnections and load short-circuits. It does not provide protection for all
misconnections.
Note 8 : <P70> Dust generation preventing (product surface is degreased and cleaned before packing. Heat sealed into anti-static bag in clean bench (Class
1000 and over).)
Note 9 : <P80> Oil free (In addition to P70 specifications, gas contact sections are degreased and cleaned. Refer to the “Internal structure drawing and parts
list” for details on the wetted section members.)
Model no.
Descriptions
Display separate type (stainless steel body)
FSM2-A[*1][*2][*3]-[*4][*5][ ]-[*6]
Full scale flow rate
005
010
020
050
100
200
500
101
201
Flow rate
range
Note 1
*3
005
500mL/min
●
010
1L/min
●
020
2L/min
●
050
5L/min
●
100
10L/m in
●
200
20 L/min
●
500
50 L/min
●
101
100 L/min
●
201
200 L/min
●
Poet size/
Body
material
*4
S06 Rc1/8 stainless steel
●
●
●
●
●
●
●
(Not for
carbon
dioxide)
S08 Rc1/4 stainless steel
●
●
●
Only air and
nitrogen gas
SM5
M5 stainless steel
(custom order product)
●
●
●
●
●
●
(Not for
carbon
dioxide)
Flow direction
*2
F
Uni-direction
R
Bi-direction
W
or
ki
n
g
co
nd
iti
on
s
W orking fluid
Note 2
*5
Blank
Clean air
(
JIS B 8392-1:2012(ISO 8573-1:2010)[1:1:1 to 5:6:2]),
com pressed air
(
JIS B 8392-1:2012(ISO 8573-1:2010)[1:1:1 to 1:6:2]), nitrogen gas
AR
Argon
C2
Carbon dioxide
Maxim um working pressure
1.0MPa
Minimum working pressure
-0.09MPa
Proof pressure
1.5MPa
Operating am bient tem perature/humidity
0 to 50°C , 90%RH or less
Fluid tem perature
0 to 50°C (no dew condensation)
A
ccu
ra
cy
Specified range
Uni-direction type: 3 to 100% F.S., bi-direction type: -100 to -3% F.S., 3 to 100% F.S.
Linearity (analog output)
W ithin ±3% F.S. (Secondary side released to atmosphere)
Pressure characteristics
W ithin ±5% F.S. (-0.09 to 0.7 MPa, secondary side released to atm osphere reference)
Temperature characteristics
W ithin ±0.2% F.S./°C (15 to 35°C, 25°C reference)
Note 3
Repeatability
W ithin ±1% F.S.
Response time
50ms or less
Type of display
Flow bar display
Output
Analog output
*1
V
1 to 5 V voltage output 1 point (connecting load impedance 50 k and over)
Note 4
A
4 to 20 mA current output 1 point (connecting load im pedance 0 to 300 )
Power supply voltage
note 5
*1
V
12 to 24 VDC (10.8 to 26.4 V)
A
24 VDC (21.6 to 26.4 V)
Current consumption
Note 6
50m A or less
Lead wire
3.7, AW G26 or equivalent × 4-conductors (connector connection), insulator O. D. 1.0
Holding function
Analog output, flow bar display, error display
Mounting orientation
Unrestricted in vertical/horizontal direction
Straight piping section
Not required
Degree of protection
IEC standards IP40 or equivalent
Protection circuit
Note 7
Power supply reverse connection protection
EMC Directive
EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
W eight (main body only)
*4
S06
Approx. 85g
S08
Approx.105g
SM5
Approx.130g
Clean room specifications
*6
Blank
Absence
P70
Dust generation preventing
Note 8
P80
Oil free
Note 9
Discontinue
