BUSCH COBRA DS 8163 A Installation And Operating Instructions Manual Download Page 1

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Installation and

Operating Instructions

Combi Screw and Roots

Vacuum Pumps

COBRA DS 8163 A

Standard version

Busch Manufacturing Korea, Ltd.

189-51, Soicheon-ro, Majang-myun

Icheon-si, Gyunggi-do, 467-813

Republic of Korea

0870772605 /

1024 / Original instructions / Subject to change without notice

Summary of Contents for COBRA DS 8163 A

Page 1: ...i Screw and Roots Vacuum Pumps COBRA DS 8163 A Standard version Busch Manufacturing Korea Ltd 189 51 Soicheon ro Majang myun Icheon si Gyunggi do 467 813 Republic of Korea 0870772605 181024 Original i...

Page 2: ...24 Signal control mode Select LL mode EXTERN 24 Current control mode Select LL mode AUTO 25 Maintenance 26 Maintenance program 26 Daily 26 Weekly 26 Monthly 26 Yearly 27 Every 16000 hours of operatio...

Page 3: ...VFD DP3 DP1 DP2 MB PTB COBRA DS 8163 A MB Roots WY A075 DP 1 Backing vacuum pump DP 600 C DP 2 Backing vacuum pump DP 600 C DP 3 Backing vacuum pump DP 600 C IN Inlet MB Roots WY A075 PTB Pump termin...

Page 4: ...COBRA DS 8163 A Page 4 0870772605 ESS OUT ECO MSF PTB COBRA DS 8163 A ECO Eletrical power supply ESS Emergency stop switch MSH Main switch OUT Discharge PTB Pump terminal box...

Page 5: ...on gas end of cylinder ECO Combined power and sensor connection EV Expansion vessel FME Flow meter nitrogen FS 1 Flow switch cooling liquid FS 2 Flow switch cooling water HE Heat exchanger IN Inlet MV...

Page 6: ...CWC Cooling water connection CWV 2 Regulating valve cooling water ECO Electrical connection FS 3 Flow switch cooling water IN Inlet MTB Motor terminal box ODP Oil drain plug OFP Oil fill plug OSG Oil...

Page 7: ...cer BUPS Back up power supply CWC Cooling water connection ECP Ground EOCR Electronic Over Current Relay EXB Extension board PLCM PLC module RC Remote control MAC Magnetic contactor MCP Motor Circuit...

Page 8: ...lating valve cooling water DGR 1 Regulating valve dilution gas middle of cylinder DGR 2 Regulating valve dilution gas end of cylinder ECO Combined power and sensor connection EV Expansion vessel FME F...

Page 9: ...essured gas is conveyed to the re spective silencers Principle of the screw vacuum pump DP The COBRA NS vacuum pumps work by the principle of screw pumps Two parallel screws 7 rotate in opposite direc...

Page 10: ...ounted at the motor endplate The flow of the cooling water is controlled by a flow switch FS 1 If the flow is under 1 l min during a minimum time of 30 seconds then the pump stops The temperature swit...

Page 11: ...s realised by the LCD The vacuum pump is delivered with a circuit breaker Safety Intended use DEFINITION To rule out any misunderstanding the term handling of the vacuum system covers transport storag...

Page 12: ...TE Type 2 work includes tasks where the energized circuits are or can be measured by placing probes through suitable openings in the covers or insulators Type 3 Equipment is energized Energized circui...

Page 13: ...l the BUSCH Semicon service team in charge of the maintenance of the pumps l Before restarting the vacuum system reactivate the FDP1 thermal relay by pressing on Reset If this does not work wait 60 se...

Page 14: ...S 1 FS 2 Depends on alarm function set in the PLC for water flow Set at factory General Stop ie the contactors open and remove power to mo tors S Nitrogen flow to low Nitrogen flowmeter FME Depends on...

Page 15: ...a means of adapted lifting control the slope of the vacuum system 5 The packaging material must be disposed of in accordance with local and national regulations This handbook is contained in the deli...

Page 16: ...5 bar Approximate flow rate 0 200 l min l Make sure that the ambient conditions correspond to the protection class of the motor according to nameplate l Make sure that the vacuum system is placed on o...

Page 17: ...bstances must be pre vented l Make sure that the intake lines are equipped with a shut off device upstream of the intake flange so that the flow of sucked gas can be stopped l Make sure that the intak...

Page 18: ...If the direction is wrong an error message appears on the LCD reverse two connection phase poles Electrical connection The vacuum system is build with voltage from 208 to 480 Volts WARNING Risk of ele...

Page 19: ...ll in by filler hole until cooling liquid flows by purge cap on cylin der endplate B side gearings l Stop filling in cooling liquid l Close the purge cap on cylinder endplate B side l Fill in again by...

Page 20: ...ight glasses l Make sure that the seals of the oil filler cap are not damaged Replace them if necessary l Screw on the oil filler cap hermetically tight COBRA DS vacuum system NOTE It is easier to swi...

Page 21: ...m system is unavoidable wait until the surface temperature has cooled down or wear protective gloves CAUTION The intensity of the noise of the vacuum system is higher within a certain area of the vacu...

Page 22: ...vacuum system deterioration by excessing temperature Switching the vacuum system on off First start up of the vacuum system l In REMOTE mode the start stop drive of the vacuum system passes through th...

Page 23: ...exceeds the threshold and is stopped if the current level drops below the threshold and if the time delay s duration has elapsed l LL Mode External u The Load Lock mode is activated and de activated...

Page 24: ...LL mode EXTERN Standard operational time chart COBRA DS 8163 A Page 24 0870772605 LCD start or Remote start tool pump Pump speed Booster Dry pump Pump ready Process on 1 Cold start 2 MB on delay 60Hz...

Page 25: ...ec 2 MB on delay 30 sec COBRA DS 8163 A Standard operational time chart 0870772605 Page 25 Pump speed Booster Dry pump Pump ready pump tool Chamber open close gate valve on off 1 Cold start 2 MB on de...

Page 26: ...oling of the vacuum pump wished or not put the label or warning board Maintenance processing on or next to the vacuum system CAUTION The oil temperature can reach a value of 90 C Danger of burns l Mak...

Page 27: ...circuit breaker l Switch on the water outlet first then inlet and nitrogen quick connections l Make sure that the Necessary intallation instructions are fol lowed l Start the vacuum system with the r...

Page 28: ...ccording to applicable regulations Draining used oil NOTE After switching off the vacuum system at normal operating temperature wait no more than 20 minutes before the oil is drained l Make sure that...

Page 29: ...on again accidentally l Unscrew the filler cap CLF for the cooling liquid l Check the level of the cooling liquid if the cooling liquid level is at the purge cap on cylinder upper plate do not unscrew...

Page 30: ...removed l Switch on the vacuum system by following the procedure described in the chapter Installation and start up Dismantling and disposal WARNING If the vacuum system has pumped gases that were con...

Page 31: ...us pump conditions which could cause personal injury Oil quantity The quantity of oil specified in the following table is of informative nature only Check the oil level with the help of the various oi...

Page 32: ...f informative nature only Respect the procedure of filling the cooling liquid Quantity Zitrec M 25 already mixed ready to use NS 600 C approx 26 litres CAUTION The proportion of pure glycol and water...

Page 33: ...speed DP 60 Hz min 1 3600 Nominal motor speed with frequency inverter MB 60 Hz min 1 3600 Noise level EN ISO 2151 50 Hz 60 Hz dB A dB A 75 Ambient temperature C F 0 40 32 104 Maximal counter pressure...

Page 34: ......

Page 35: ...equipment and following the standards Standard Title of the standard EN ISO 12100 2010 Safety of machinery Basic concepts general principles of design EN ISO 13857 2008 Safety of machinery Safety dis...

Page 36: ...Majang myun Icheon si Gyunggi do 467 813 Republic of Korea Phone 82 31 645 2700 Fax 82 31 631 2898 e mail busch busch co kr Malaysia Busch Malaysia Sdn Bhd 4 6 Jalan Taboh 33 22 Seksyen 33 Shah Alam T...

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