Buehler EcoMet 300 Standard Operating Manual Download Page 3

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NANOSYSTEM

FABRICATION FACILITY (NFF), HKUST

Version 1.0

Page 3 of 20

Buehler EcoMet

300

Silicon

Polisher

Picture and Location

This tool is located at Room 2227.

2. Process Capabilities

2.1 Cleanliness Standard

EcoMet

300 silicon polisher is classified as a

Semi-Clean

equipment.

2.2 Possible Polishing Materials

Silicon, Silicon Oxide, Silicon Nitride

Fig.1 Buehler EcoMet

300 Silicon Polishing Machine

Summary of Contents for EcoMet 300

Page 1: ...NANOSYSTEM FABRICATION FACILITY NFF HKUST Version 1 0 Page 1 of 20 Standard Operating Manual ___________________________________________________________ Buehler EcoMetTM 300 Silicon Polisher ...

Page 2: ...1 Emergency Responses and Communications 3 2 Training to Become a Qualified EcoMetTM 300 User 4 Operating Procedures 4 1 System Description 4 2 Safety Warnings 4 3 Operation Precautions and Rules 4 4 Initial Status Checks 4 5 Initial System Checks 4 6 Preparation before Polishing 4 7 Polish Cloth and Slurry Selection 4 8 Polish Parameters setting 4 9 During the Run 4 10 Process Recording during th...

Page 3: ...her 1 Picture and Location This tool is located at Room 2227 2 Process Capabilities 2 1 Cleanliness Standard EcoMetTM 300 silicon polisher is classified as a Semi Clean equipment 2 2 Possible Polishing Materials Silicon Silicon Oxide Silicon Nitride Fig 1 Buehler EcoMetTM 300 Silicon Polishing Machine ...

Page 4: ...e smaller than 4 inch What the EcoMetTM 300 Silicon Polisher CANNOT do 1 EcoMetTM 300 should not be used to polish a sample larger than 4 inch in diameter 2 EcoMetTM 300 should not be used to polish a sample not bounded on our standard holder 3 EcoMetTM 300 should not be used to polish a sample with large area of metal on the surface 4 EcoMetTM 300 should not be used to polish a sample with any ph...

Page 5: ...cian 2358 7896 2358 7219 2 Shuyun ZHAO Scientific Officer 2358 7212 3 2 Training to Become a Qualified EcoMetTM 300 User Please follow the procedures below to become a qualified user of the EcoMetTM 300 1 Read all materials provided on the NFF website of the EcoMetTM 300 2 E mail to Mr Henry Chun Fai YEUNG requesting EcoMetTM 300 operation training 3 Hands on operation training for EcoMetTM 300 is...

Page 6: ...x the problem by yourself Please contact NFF staffs 2 In emergency please push the red emergency button to interrupt the equipment power and report to the NFF staffs immediately DO NOT attempt to resume the equipment on before the problem is solved 3 During process if something going wrong and you are not sure what happens please report to NFF module staffs 4 3 Operation Precautions and Rules 1 Pl...

Page 7: ...ate the machine please make sure you have read and check the details of the check list 4 5 Initial system checks 1 Turn on the main power on the backside and check the front blue power button in ON 2 Check the N2 pressure is 35psi 4 6 Preparation before Polishing A Sample preparation wafer bonding If the sample is grinded using NVG 200A Silicon Grinder firstly please ignore this step 1 If the samp...

Page 8: ... Version 1 0 Page 8 of 20 for 3 5 minute 4 Melting enough wax on the ceramic holder as shown in Fig 3 5 Put your sample on top of the wax and move the wafer in different direction to even the wax for a flat surface see Fig 4 Fig 2 Fig 3 Fig 4 ...

Page 9: ... the RED pneumatic button to horizontal position 2 as shown in Fig 6a and let the heavy metal drop down to the sample surface Then switch the RED pneumatic button to position 3 to add 0 5MPa pressure to heavy metal for around 5mins until the ceramic holder is cooled down to room temperature Fig 6b DON T adjust the pressure by yourself Oil paper Silicone pad Fig 5 a b Position2 Position3 Fig 6 a b ...

Page 10: ...mediately otherwise the ceramic holder will drop to the bottom and might be broken 9 Measure the thickness or flatness using dial gauge shown in Fig 7 Put the sample on top of the granite master flat Press the ON OFF button to turn on the dial gauge Push the hand vacuum pump to rise up the probe and release it to let the probe touch sample surface Click the reset button to reset the zero position ...

Page 11: ...hown in step 2 Use the adhesive tape to fix them together as shown in step 3 4 7 Polish Cloth and Slurry Selection Select proper polishing cloth and slurry diamond suspension size according to your requirements The polishing pad is bonded on a Teflon coated metal plate Put the polishing pad and metal plate on top of the magnetic disc We will help user to develop your own process using NFF polishin...

Page 12: ...g You have to buy your own polishing pad from NFF for normal user You have to keep your own polishing pad by yourself DON T use any polishing cloth slurry or lubricant not from NFF Different size of diamond suspension and Lubricant Different type of polishing cloth in cabinet Fig 9 ...

Page 13: ... 300 silicon polisher The detailed functions of the buttons are listed below Water ON OFF Fig 10 Control panel of EcoMetTM 300 silicon polisher Fresh water Recirculating None Increase Decrease Platen Only Dispenser NA for us PAUSE STOP TIME SPEED FLUIDS Head Rotation Complementary Contra Force N Newtons LBS Pounds Force mode Central Single ...

Page 14: ...en fresh water recirculated water and OFF Head rotation Selects the rotational direction of the head and specimen holder Complementary or Contra Force Displays the amount of operational force applied to the specimens in specimen holder Water Activates the water flow for platen cooling and rinsing Force mode Selects between Single or Central mode Central for large sample Increase Increase the param...

Page 15: ... Micro Cloth Gray Water 3 6 NO NA Micro Cloth Gray Water 3 Step 1 is for coarse polish steps 2 3 are for intermediate polish and steps 4 6 are for fine polish Typical parameters TIME 3mins SPEED 60rpm for both base and head Fluid is set to fresh Water is set to OFF Head rotation is complementary Force 10 LBS Note To use water position the Water Dispensing Arm over the platen Press the Water button...

Page 16: ...ape bowl Rotate the locking handle as shown in Fig 11 counter clockwise to loosen the power head Move the power head into the desired position Rotate the locking handle clockwise to tighten and secure the power head into position 2 Loading sample Position the power head for easy loading of the sample Locking Handle Fig 11 Locking handle of the power head ...

Page 17: ...nd gently rotate it until it aligns to the lock as shown in Fig 12 step 2 Release the outer sleeve of the lift lock the sample holder will be fixed to power head as shown in Fig 12 step 3 Check whether the sample holder is fastened or not by your hand Position the polishing head and it is ready to begin the polishing cycle Step1 Step2 Step3 Alignment lock Fig 12 Sample loading ...

Page 18: ...e polishing pad and automatically stop when it touches the surface then the polishing cycle is activated The polishing cycle will stop when the setting time is up and the polishing head will move to the original position automatically Unload the sample and check the surface using microscope Unloaded polishing cloth should be wiped clean using clean room papers and put it to the shelf and dry it Al...

Page 19: ...h in front panel and in backside Turn off the DI water and N2 flow Pack the polishing clothes and put them back to cabinet Put the slurry and lubricant bottles back Turn off the dial gauge Turn off the hotplate 4 10 Process Recording during the process 1 Please be reminded you are required to fill all the details of the log sheets 2 However if you fail to do this a punishment will be given 3 Write...

Page 20: ...e polishing cloth except using silica 0 06µm slurry DON T spray too much diamond suspensions and lubricant DON T mix the polishing cloth and the plastic bags DON T use any polishing cloth and slurry not from NFF Increase the force gradually DON T increase a force with the step larger than 20LBS If the sample is irregular shape please polish the sharp corner using abrasive paper before wafer bondin...

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