NANOSYSTEM
FABRICATION FACILITY (NFF), HKUST
Version 1.0
Page 10 of 20
8) Take out the ceramic holder by switching the RED pneumatic button back to
position 2 and then position 1. The heavy metal will lift up to initial position.
Please be careful about the ceramic holder. Sometimes the ceramic holder will
goes up together with the heavy metal. User should put one hand under it
immediately, otherwise, the ceramic holder will drop to the bottom and might
be broken.
9) Measure the thickness or flatness using dial gauge, shown in Fig. 7.
Put the sample on top of the granite master flat;
Press the ON/OFF button to turn on the dial gauge;
Push the hand vacuum pump to rise up the probe, and release it to let the
probe touch sample surface.
Click the reset button to reset the zero position (optional);
Push the hand vacuum pump and move the sample, then release it to do the
measurement.
Fig. 7
Reset button
Granite
master flat
Hand vacuum
pump
Probe
Digital display
ON/OFF
