NANOSYSTEM
FABRICATION FACILITY (NFF), HKUST
Version 1.0
Page 18 of 20
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Start the polishing process
Before the process, spray proper lubricant and diamond suspension to the
polishing pad and spread them by rotating the platen manually.
The green power head start buttons are located on each side of the power head,
as shown in Fig. 13.
Simultaneously press both buttons, the power head will move toward the
polishing pad and automatically stop when it touches the surface, then the
polishing cycle is activated.
The polishing cycle will stop when the setting time is up, and the polishing
head will move to the original position automatically.
Unload the sample and check the surface using microscope.
Unloaded polishing cloth should be wiped clean using clean room papers and
put it to the shelf and dry it.
All the polishing cloths should be put into the plastic bags and put back into
the cabinet according to their labels.
Green start button 1#
(not shown)
Green start button 2#
Fig. 13 Power head start buttons
