NANOSYSTEM
FABRICATION FACILITY (NFF), HKUST
Version 1.0
Page 4 of 20
2.3 Process Specification
What EcoMet
TM
300 Silicon Polisher CAN do
1. EcoMet
TM
300 can provide mechanical polish of sample surface using different
size of slurry corresponding to different type of polish cloth.
2. EcoMet
TM
300 can polish the samples with thickness from tens microns to one
millimeters.
3. EcoMet
TM
300 can polish the samples in any shape, with size smaller than 4
inch.
What the EcoMet
TM
300 Silicon Polisher CANNOT do
1. EcoMet
TM
300 should not be used to polish a sample larger than 4 inch in
diameter.
2. EcoMet
TM
300 should not be used to polish a sample not bounded on our
standard holder.
3. EcoMet
TM
300 should not be used to polish a sample with large area of metal
on the surface.
4. EcoMet
TM
300 should not be used to polish a sample with any photoresist
coated on the surface.
5. EcoMet
TM
300 should not be used to polish a sample with fine structures on the
surface.
6. EcoMet
TM
300 should not be used to polish a sample using polishing cloth,
slurry or lubricant not from NFF.
