NANOSYSTEM
FABRICATION FACILITY (NFF), HKUST
Version 1.0
Page 19 of 20
Repeat the above polishing steps using suitable polishing cloth, slurry and
lubricant until the surface roughness meets the requirement.
(4)
Unloading and cleaning
When process is finished, raise the lift-lock chuck and release the sample
holder.
Cleaning the D-shape bowl using DI water and wipe dry using dust-free
paper.
Move the power head to side and cover the D-shape bowl.
Turn off the power buttons both in front panel and in backside.
Turn off the DI water and N
2
flow.
Pack the polishing clothes and put them back to cabinet.
Put the slurry and lubricant bottles back.
Turn off the dial gauge.
Turn off the hotplate.
4.10
Process Recording during the process
1. Please be reminded you are required to fill all the details of the log sheets
2. However, if you fail to do this, a punishment will be given
3. Write down any problems or comments in the log sheets
4.11
Clean up
1. Clean the work table and make sure everything is back to the original place.
2. Turn off the dial gauge.
3. Turn off the hot plate.
4. Tie the garbage bag and put it outside the door to prevent the small particles
