NANOSYSTEM
FABRICATION FACILITY (NFF), HKUST
Version 1.0
Page 11 of 20
B) Drive adapter and ceramic holder bonding
As shown in Fig. 8. The sample is bonded on the ceramic holder.
Put the ceramic holder and the drive adapter together as shown in step 2.
Use the adhesive tape to fix them together as shown in step 3.
4.7
Polish Cloth and Slurry Selection
Select proper polishing cloth and slurry (diamond suspension) size according to
your requirements.
The polishing pad is bonded on a Teflon coated metal plate. Put the polishing
pad and metal plate on top of the magnetic disc.
We will help user to develop your own process using NFF polishing pad at
Step1
Step2
Step3
Fig. 8
