NANOSYSTEM
FABRICATION FACILITY (NFF), HKUST
Version 1.0
Page 7 of 20
5. Do not use the equipment after office hour.
4.4
Initial Status checks
1. Please check the status of shutdown notice posted in the NFF reservation
website.
2. Please check the reservation status on the website, and reserve the right time
slot by your own.
3. Please check-in the equipment on your own according to the reserved time
slot.
4. Before operate the machine, please make sure you have read and check the
details of the check list.
4.5
Initial system checks
1. Turn on the main power on the backside and check the front blue power button
in ON.
2. Check the N
2
pressure is ~35psi.
4.6
Preparation before Polishing
A)
Sample preparation--wafer bonding*
(*If the sample is grinded using NVG-200A Silicon Grinder firstly, please ignore
this step)
1) If the sample is irregular shape, please polish the sharp corner using abrasive
paper before wafer bonding.
2) Put the ceramic holder on the hotplate.
3) Turn on the hotplate, as shown in Fig. 2, adjust the knob to position 6-7, wait
