ii
Brooks
®
Model 5860
i
Contents
Installation and Operation Manual
X -TMF-5860i-MFM-eng
Part Number:541B110AAG
November, 2008
Figures
Figure
Page
Number
Number
1-1
Typical Response to Flow Step Changes .......................... 1-2
2-1
Model 5860
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Dimensions ................................................... 2-2
2-2
"D" Type Connector Pin Arrangement ............................... 2-2
2-3
Maximum Allowable Loop Resistance ............................... 2-3
2-4
Common Electrical Hook-Ups ........................................... 2-6
3-1
Flow Sensor Operational Diagram .................................... 3-2
3-2
Model 5860
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Calibration Connections ................................ 3-4
3-3
Adjustment Potentiometer Location ................................... 3-4
3-4
Fast Response Adjustment ............................................... 3-4
3-5
PC Board Jumper Location and Function .......................... 3-6
5-1
Model 5860
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Parts Drawing ............................................... 5-2
Tables
Table
Page
2-1
Recommended Filter Size ................................................. 2-5
4-1
Bench Troubleshooting ...................................................... 4-2
4-2
Sensor Troubleshooting ..................................................... 4-2
4-3
Conversion Factors (Nitrogen Base) ................................. 4-7
4-4
Restrictor Selection Guide ................................................ 4-11
5-1
Model 5860
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Replacement Parts List ................................. 5-3
5-2
Tool and Spare Part Kits for 5860
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5-3
