4-1
Brooks
®
Model 5860
i
Section 4 Maintenance
Installation and Operation Manual
X-TMF-5860i-MFM-eng
Part Number: 541B110AAG
November, 2008
4-1 General
No routine maintenance is required on the Model 5860
i
other than an
occasional cleaning. If an in-line filter is used, the filtering element should
periodically be replaced or ultrasonically cleaned.
4-2 Troubleshooting
A. System Checks
The Model 5860
i
is generally used as a component in gas handling
systems which can be quite complex. This can make the task of isolating a
malfunction in the system a difficult one. An incorrectly diagnosed
malfunction can cause many hours of unnecessary downtime. If possible,
make the following system checks before removing a suspected defective
mass flow meter for bench troubleshooting or return, especially if the
system is new:
1. Verify low resistance power supply connections and that the correct
power supply voltage and signals are reaching and leaving the meter.
The breakout board (P/N S273Z668AAA) listed in Section 5 will make
this job much easier.
2. Verify that the process gas connections have been correctly terminated
and leak checked.
3. Verify that all user selectable jumpers are in their desired positions.
Refer to Figure 3-5.
B. Bench Troubleshooting
1. Properly connect the mass flow meter to a +15 to +28 Vdc power
supply, and connect an output signal readout device (4-1/2 digit
