1-3
Brooks
®
Model 5860
i
Section 1 Introduction
Installation and Operation Manual
X-TMF-5860i-MFM-eng
Part Number: 541B110AAG
November, 2008
Ambient Temperature Limits
Operating: 5 to 65°C (40 to 150°F)
Non-Operating: -25 to 100°C (-13 to +212°F)
Working Pressure
4500 psi (31.03 MPa) maximum
Output Signal
0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV. Jumper
selectable 4-20 mAdc or 0-20 mAdc. Refer to Figure 2-3 for maximum total
loop resistance.
Temperature Sensitivity
Zero: Less than ±0.075% F.S. per degree C
Span: Less than ±1.0% F.S. shift over 10-50° C range
Pressure Sensitivity
0.03% per PSI up to 200 PSIG
Power Supply Sensitivity
Negligible over the allowable voltage range
Mounting Attitude Sensitivity
±0.5% maximum full scale deviation after re-zeroing
Leak Integrity
1 x 10
-9
Atm. scc/sec Helium
Usable Range
50 to 1
Mechanical Connection
Compatible with most popular mass flow equipment. Refer to Figure 2-1.
Electrical Connection
D-type, 15 pin connector (DA-15P)
*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard: 0°C and
101.3 kPa (760 Torr). The mass flowmeter can be calibrated to other
reference standard conditions. Specify at time of ordering.
