i
Brooks
®
Model 5860
i
Contents
Installation and Operation Manual
X -TMF-5860i-MFM-eng
Part Number: 541B110AAG
November, 2008
Section 1
Introduction
Paragraph
Page
Number
Number
1-1
Purpose ............................................................................. 1-1
1-2
Description ........................................................................ 1-1
1-3
Specifications .................................................................... 1-2
Section 2
Installation
2-1
Receipt of Equipment ........................................................ 2-1
2-2
Recommended Storage Practice ....................................... 2-1
2-3
Return Shipment ............................................................... 2-3
2-4
Gas Connections ............................................................... 2-4
2-5
Installation ......................................................................... 2-4
2-6
In-Line Filter ...................................................................... 2-5
2-7
Electrical Interfacing .......................................................... 2-5
2-8
Configuring PC Board ....................................................... 2-6
Section 3
Operation
3-1
Theory of Operation .......................................................... 3-1
3-2
Operating Procedure ......................................................... 3-2
3-3
Zero Adjustment ................................................................ 3-2
3-4
Calibration Procedure ........................................................ 3-3
3-5
Response (Flow Output Signal) ........................................ 3-7
Section 4
Maintenance
4-1
General .............................................................................. 4-1
4-2
Troubleshooting ................................................................. 4-1
4-3
Sensor Tube ...................................................................... 4-4
4-4
Disassembly and Assembly .............................................. 4-4
4-5
Use of the Conversion Tables ............................................ 4-6
4-6
Restrictor Sizing ................................................................ 4-9
Section 5
Parts List
5-1
General .............................................................................. 5-1
Section A
CE Certification
CE Certification of Mass Flow Equipment ......................... A-1
