Brooks 5860i, Installation And Operation Manual

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Brooks
®
Model 5860 i
4-8
Section 4 Maintenance
Installation and Operation Manual
X-TMF-5860i-MFM-eng
Part Number: 541B110AAG
November, 2008
Table 4-3 Conversion Factors (Nitrogen Base) Continued
GAS NAME FORMULA SENSOR ORIFICE DENSITY
FACTOR FACTOR (kg/m 3 )
Hydrogen H
2
1.008 0.269 0.090
Hydrogen Bromide HBr 0.987 1.695 3.645
Hydrogen Chloride HCL 0.983 1.141 1.639
Hydrogen Cyanide HCN 0.744 0.973 1.179
Hydrogen Fluoride HF 0.998 0.845 0.893
Hydrogen Iodide HI 0.953 2.144 5.789
Hydrogen Selenide H
2
Se 0.837 1.695 3.613
Hydrogen Sulfide H
2
S 0.850 1.108 1.539
Iodine Pentafluoride IF
5
0.283 2.819 9.907
Isobutane C
4
H
10
0.260 1.440 2.593
Isobutene C
4
H
8
0.289 1.435 2.503
Isopentane C
5
H
12
0.211 1.605 3.222
Krypton Kr 1.382 1.729 3.708
Methane CH
4
0.763 0.763 0.717
Methylacetylene C
3
H
4
0.473 1.196 1.782
Methyl Bromide CH
3
Br 0.646 1.834 4.236
3-Methyl-1-butene C
5
H
10
0.252 1.584 3.127
Methyl Chloride CH
3
CL 0.687 1.347 2.308
Methyl Fluoride CH
3
F 0.761 1.102 1.518
Methyl Mercaptan CH
4
S 0.588 1.313 2.146
Methyl Silane CH
6
Si 0.393 1.283 2.061
Methyl Trichlorosilane (MTS) CH
3
Cl
3
Si 0.267 2.310 6.675
Methyl Vinyl Ether C
3
H
6
O 0.377 1.435 2.567
Monoethanolamine C
2
H
7
NO 0.305 1.477 2.728
Monoethylamine C
2
HH
5
NH
2
0.359 1.269 2.013
Monomethylamine CH
3
NH
2
0.565 1.067 1.420
Neon Ne 1.398 0.847 0.902
Nickel Carbonyl Ni(CO)
4
0.212 2.371 7.008
Nitric Oxide NO 0.995 1.030 1.339
Nitrogen N
2
1.000 1.000 1.251
Nitrogen Dioxide NO
2
0.758 1.713 2.052
Nitrogen Trifluoride NF
3
0.501 1.598 3.168
Nitrogen Trioxide N
2
O
3
0.443 1.649 3.389
Nitrosyl Chloride NOCL 0.644 1.529 2.913
Nitrous Oxide N
2
O 0.752 1.259 1.964
Octofluorocyclobutane C
4
F
8
0.169 2.672 8.933
Oxygen O
2
0.988 1.067 1.429
Oxygen Difluoride OF
2
0.672 1.388 2.402
Ozone O
3
0.738 1.310 2.138
Pentafluorethane f-125 C
2
HF
5
0.287 2.070 5.360
Pentane (n-Pentane) C
5
H
12
0.212 1.605 3.222
Perchloryl Fluoride CLO
3
F 0.448 1.905 4.571
Perfluorobutane C
4
F
10
0.738 2.918 10.61
Perfluoro-2-Butene C
4
F
8
0.268 2.672 8.933
Perfluoromethyl-vinylether PMVE 0.296 2.029 5.131
Perfluoropropane C
3
F
8
0.179 2.591 8.396
Pentane (n-Pentane) C
5
H
12
0.212 1.605 3.222
Phosgene COCL
2
0.504 1.881 4.418
Phosphine PH
3
0.783 1.100 1.517
Phosphorous Pentafluoride PF
5
0.346 2.109 5.620
Phosphorous Trifluoride PF
3
0.495 1.770 3.906
Propane (same as CH
3
CH
2
CH
3
) C
3
H
8
0.343 1.274 2.008
Propylene (Propene) C
3
H
6
0.401 1.234 1.875
Rhenium Hexafluoride ReF
6
0.230 3.279 13.41
Silane SiH
4
0.625 1.070 1.440
Silicon Tetrachloride SiCL
4
0.310 2.465 7.579
Silicon Tetrafluoride SiF
4
0.395 1.931 4.648
Sulfur Dioxide SO
2
0.728 1.529 2.858
Sulfur Hexafluoride SF
6
0.270 2.348 6.516
Sulfur Tetrafluoride SF
4
0.353 1.957 4.776
Sulfur Trioxide SO
3
0.535 1.691 3.575
Sulfuryl Fluoride SO
2
F
2
0.423 1.931 4.648
Tetrachloromethane CCL
4
0.344 2.345 6.858
Tetrafluoroethylene (TFE) C
2
F
4
0.361 1.905 4.526
Tetrafluorohydrazine N
2
F
4
0.367 1.926 4.624
Trichlorofluoromethane f-11 CCL
3
F 0.374 2.244 6.281
Trichlorosilane SiHCL
3
0.329 2.201 6.038
Trimethyloxyborane (TMB) B(OCH
3
)
3
0.300 1.929 4.638
1,1,2-Trichloro-1,1,2-Triflouroet f-113 C
2
CL
3
F
3
0.231 2.520 7.920
Trimethylamine (CH
3
)
3
N 0.316 1.467 2.639
Tungsten Hexafluoride WF
6
0.227 3.264 13.28
Uranimum Hexafluoride UF
6
0.220 3.548 15.70
Vinyl Bromide C
2
H
3
Br 0.524 1.985 4.772
Vinyl Chloride C
2
H
3
CL 0.542 1.492 2.788
Vinyl Fluoride C
2
H
3
F 0.576 1.281 2.046
Water Vapor H
2
O 0.861 0.802 0.804
Xenon Xe 1.383 2.180 5.851