Section 1 Introduction
Scope
Thank you for purchasing a Brooks Instrument Digital Mass Fow Product. This
manual, X-TMF-SLAMf-Series-RevB-MFC-eng is an installation and operation
manual for your instrument.
Purpose
The SLAMf Series are mass flow measurement devices designed for ac
-
curately measuring (MFM's) and rapidly controlling (MFC's) flows of gases.
This instruction manual is intended to provide the user with all the information
necessary to install, operate and maintain the Brooks
®
MFC and MFM. This
manual is organized into the following sections:
Section 1
Introduction
Section 2
Installation
Section 3
Operation
Section 4
Maintenance & Troubleshooting
Section A
Essential Instructions
Back Cover
Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting to
operate or repair these digital products.
Specifications (Reference Tables 1-1, 1-2 and 1-3)
1
