Section 3 Operation
SLAMf Series
Biotech
The SLAMf
Biotech
Options ship with 4 sets of gas calibration data for N2,
CO2 , Air, and O2, which are the 4 BioTech gasses. The standard BioTech
Options ship with calibration curves obtained by use of N2 as a surrogate gas.
Actual CO2 Calibration is available for SLAMF50/60 and SLAMF51/61 as an
additional option. As such, each gas set or “page” includes a calibration curve,
PID controller settings, valve performance data, and information about the
calibration conditions.
The operator can activate one of the gas calibrations “pages” either through
the Brooks Expert Support Tool (BEST) software located on the Brooksinstru-
ment.com website; or, the operator can also activate gas pages through the
digital communications protocols if the SLA58XX/SLAMFXX BioTech devices
is so equipped.
When using BEST, the pages will appear in the calibration table in the same
order as noted. Air will appear as calibration #1; N2 as calibration #2 and 02
as calibration #3 and C02 as Calibration #4. For more detailed instructions on
how to activate gas pages using BEST, please see the Cal Pages and Flow
Cal Pages section of the Installation and Operations manual for BEST, also
available at Brooksinsturment.com.
The DeviceNet, Profibus, EtherNet/IP, and RS485 supplemental manuals
describe further details on how to change gasses for specific communication
features.
Analog I/O Mode of Operation
The following paragraphs describe the basic features of the Brooks SLAMf
Digital Series Mass Flow Meters/Controllers.
Functional Description
The analog interface may include any of the following I/O options as specified
by the user:
0 - 5 Vdc setpoint, 0 - 5 Vdc flow output
1 - 5 Vdc setpoint, 1 - 5 Vdc flow output
0 - 20 mA setpoint, 0 - 20 mA flow output
4 - 20 mA setpoint, 4 - 20 mA flow output
0-10 Vdc Setpoint, 0-10 Vdc flow output
Also included is the Valve Override input pin. All analog signals are available
on the terminal board. (See Fig. 2-1 for connections). The stored calibrations
are determined from the customer order. Only those calibrations ordered will
be available in the instrument. Unless otherwise specified, a Brooks SLAMf
Digital MFC/MFM ordered with only one calibration will have that calibration
stored in calibration #1.
Before operating the MFC/MFM, apply power and warm-up the instrument for
approximately 45 minutes. After warm-up, apply gas pressure, then proceed
by following the instructions in the following sections.
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