Product Support References
Refer to www.BrooksInstrument.com for Brooks sales and service
locations and to obtain other documents that support the GP200
Series. Those documents include:
•
Brooks Expert Support Tool (BEST)
•
Brooks GP200 Series Datasheet
Notice and Caution Statements
Warning, caution, and notice statements are located throughout this
manual in the ANSI format. A WARNING statement indicates a
potentially hazardous situation which, if not avoided, COULD result
in death or serious injury. A CAUTION statement indicates a
potentially hazardous situation which, if not avoided, MAY result in
minor or moderate injury. It may also be used to alert against unsafe
practices. A NOTICE statement describes specific information that
requires special attention.
Product Warranty
Product warranty information can be found on the Brooks website
at www.BrooksInstrument.com. This information provides general
warranty information, limitations, disclaimers, and applicable
warranty periods according to product group.
Industry Standard References
Table 1-1 Industry Standard References
Reference Number
Reference Description
MIL-STD-810
Method 514.4, Category 1, Transportation Requirement
Method 516.4, Procedure 1, Functional Shock Test Requirement
SEMI E12
Standard temperature and pressure
SEMI E16
Guideline for determining and describing MFC leak rates
SEMI E17
Guideline for MFC transient characteristics tests
SEMI E18
Guideline for temperature specifications of the MFC
SEMI E27
Standard for MFC and MFM linearity
SEMI E28
Guideline for pressure specifications for the MFC
SEMI E52
Practice for referencing gases used in digital MFCs
SEMI E54
Sensor actuator network connections for DeviceNet
SEMI E56
Test method for determining accuracy, linearity, repeatability, short-term
reproducibility, hystereses of thermal MFCs
SEMI E66
Test method for determining particle contribution by MFCs
SEMI E67
Test method for determining reliability of MFCs
SEMI E68
Test method for determining warm-up time of MFCs
Section 1 Introduction
2
Summary of Contents for GP200 Series
Page 1: ...Installation Operation Manual GP200 Series Metal Sealed Pressure Based Mass Flow Controllers ...
Page 10: ...Table 1 3 Specifications for GP200 Series Section 1 Introduction 6 ...
Page 11: ...Section 1 Introduction 7 ...
Page 12: ...Figure 1 1 Dimensions of GP200 Series Downport Configurations Section 1 Introduction 8 ...
Page 13: ...Figure 1 2 Dimensions of GP200 Series VCR Configurations Section 1 Introduction 9 ...
