Figure 2-1 Typical Gas Supply Arrangement
Purge the Gas Supply Line Before GP200 Series Installation
Before operating the GP200 Series, the gas supply line must be
completely purged with nitrogen or argon to ensure the line is free
from toxic or flammable gases, contaminants, moisture, and
oxygen. The purge gas must be free of moisture and oxygen to less
than 100 ppb. Purge the gas lines as follows or in accordance to
prescribed company and safety procedures.
1. Shut off the process gas supply valve(s) upstream of the GP200
For additional safety, it is recommended to close the two valves between
the charged gas line and the GP200 Series to be installed. See Figure
above for more details.
It is recommended to archive service and calibration documentation for
the GP200 Series to determine the contamination state of each gas line
and to assist service personnel.
DO NOT remove the shipping caps covering the inlet/outlet for VCR
fittings, or DO NOT remove the blue tape on the bottom of the device for
downport fittings before the GP200 Series is being installed. Failure to
comply will introduce contaminants into the GP200 Series.
Section 2 Installation
13
Summary of Contents for GP200 Series
Page 1: ...Installation Operation Manual GP200 Series Metal Sealed Pressure Based Mass Flow Controllers ...
Page 10: ...Table 1 3 Specifications for GP200 Series Section 1 Introduction 6 ...
Page 11: ...Section 1 Introduction 7 ...
Page 12: ...Figure 1 1 Dimensions of GP200 Series Downport Configurations Section 1 Introduction 8 ...
Page 13: ...Figure 1 2 Dimensions of GP200 Series VCR Configurations Section 1 Introduction 9 ...
