A-1
Brooks
®
Models 0152/0154
Appendix A Engineering Units
Installation and Operation Manual
X-SE-0152-0154-eng
Part Number: 541C052AAG
March, 2008
A-1 Available Engineering Units
ml/s
ml/min
ml/h
mls/s
mls/min
mls/h
mln/s
mln/min
mln/hl/s
l/min
l/h
ls/s
ls/min
ls/h
ln/s
ln/min
ln/h
cm^3/s
cm^3/min
cm^3/h
cm^3s/s
cm^3s/min
cm^3s/h
cm^3n/s
cm^3n/min
cm^3n/h
m^3/s
m^3/min
m^3/h
m^3s/s
m^3s/min
m^3s/h
m^3n/s
m^3n/min
m^3n/h
Note: “. ^3” means cubic “ .
3
“
g/min
g/h
lb/s
lb/min
lb/h
kg/s
kg/min\
kg/h
ft^3/s
ft^3/min
ft^3/h
ft^3s/s
ft^3s/min
ft^3s/h
ft^3n/s
ft^3n/min
ft^3n/h
SCCM
SLPM
bar
mbar
psi
kPa
Torr
atm
Volt
mA
