Bronkhorst®
Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
9.17.045V
7
1
Introduction
1.1
Scope of this manual
This manual covers the IQ+FLOW® series Digital Mass Flow / Pressure Controllers for gases. It includes product information,
installation instructions, operation, maintenance and troubleshooting.
1.2
Product description
The IQ
+
FLOW® series is one of the smallest mass flow, chip based, instruments of its kind for applications with pressure
conditions up to 10 bar (145 psi) and temperatures between 5 to 50 °C (41 to 122 °F). Due to the use of micro system
technology, ultra compact flow controllers are realised with dimensions of only 20 x 40 x 60 mm. The (IQF) flow controllers
are able to measure and control flow rates of 10 mln/min FS up to 5 ln/min FS. The (IQP) pressure controllers are available in
ranges from 0.3 to 150 psi (0.02 to 10 bar). The IQ
+
FLOW® series has a modular concept with combinations of 20 mm
footprint modules, available as single instruments, but also as multiple channel arrangements. A very compact manifold
(IQM) system can be constructed, with one multi-channel digital pc-board (per 3 channels) in a single housing. Additional
filters, control valves and shut-off valves are available with the same footprints to meet customer demands. The IQF flow
sensor is a fast-response chip sensor, with the main advantage of fast and reliable control response. This is possible due to
the MBC3-based pc-board and the flow sensor, which output signal very accurately corresponds with the real flow
behavior.
Communication with the devices can be either in analog mode or digital over RS232 or RS485. Communication over RS232 is
established with the Propar (FLOW-BUS) protocol. With digital operation over RS485 a bus-system with multiple instruments
can be set up. Modbus RTU/ASCII and FLOW-BUS protocols are supported (some exceptions for multi-channel versions, see
section 3
).
1.3
Other documentation
Instructions:
·
IQ
+
FLOW® Quick Installation Guide (document no. 9.17.074)
·
Operation instructions digital instruments (document no. 9.17.023)
·
RS232 interface with FLOW-BUS for digital instruments (document no. 9.17.027)
·
Modbus slave interface for digital Mass Flow / Pressure instruments (document no. 9.17.035)
Technical drawings:
·
Hook-up diagram IQ
+
FLOW® RS232/RS485 + Analog I/O (document no. 9.16.101)
·
Hook-up diagram IQ
+
FLOW® Manifold (multi-channel) (document no. 9.16.090)
·
Dimensional drawing IQF/IQP (document no. 7.05.870)
·
Dimensional drawing IQFD/IQPD (document no. 7.05.871)
·
Dimensional drawing IQM (document no. 7.05.760)
These documents can be downloaded from
www.bronkhorst.com/downloads
and are available by request at our local
sales & service representatives
