MPS 500 User Manual Rev.2.1
BeamTec GmbH
Wolfgang-Paul-Str. 4, 89081 Ulm, Germany
http:
, e-mail: [email protected] tel.: +49 731 146620-0
5
1.I
NTRODUCTION
Please read this manual carefully to ensure optimum operating conditions right from the
start. This user manual handbook contains important information about the functionality,
installation, start-up and operation of the Magnetron Power Supply MPS500.
1.1.
I
NTENDED
U
SE
Power Supply MPS500 is a high voltage device which generates a high DC voltage of negative
polarity. MPS500 can be operated in three modes: Constant Power, Constant Voltage or
Constant Current.
The main field of application is the formation of plasma processes. The concept and design of
the power supply allows for safe and reliable integration of complex process control systems.
The device is referred to as MPS500 in the remainder of this manual.
1.2.
L
IABILITIES AND
W
ARRANTY
BeamTec BeamTec company is not liable for damages resulting from improper use of the
device and the guarantee expires, if the user, or third party:
-
ignores information contained in this manual,
-
utilizes the product in a manner inconsistent with intended purpose,
-
makes any modification or alteration of the product,
-
unit should not be used with unauthorized accessories
(compatible accessories, types
and models can be found in the product documentation)
BeamTec company reserves the right to make changes without prior notice. Illustrations may
vary depending on the version of the device.
