MPS 500 – User Manual Rev. 2.1
BeamTec GmbH
Wolfgang-Paul-Str. 4, 89081 Ulm, Germany
http:
, e-mail: [email protected] tel.: +49 731 146620-0
24
3.3.6.
V
ACUUM
G
AUGE
C
ONNECTOR
–
„G
AUGE
”
One feature of the MPS500 is to support a single vacuum measurement gauge input.
This facilitates process control where the high voltage can be activated or deactivated
during processing depending on the vacuum level.
Most commercially available active gauges can be connected directly to the MPS500.
The list of the available gauges is continually updated and provided with each
firmware upgrade ( contact supplier for available firmware versions ).
The vacuum gauge can be connected directly to the D-Sub 9 connector. Please refer to
Fig 3.3.2
for details
1
Fig. 3.3.2 Vacuum gauge connector pinouts
1 - PG sense Hi Bridge,
2
–
PG Bridge power signal
3
–
Analogue IN input signal ( 0 … 10V ),
( gauge 1 )
4
–
PG I Bridge signal,
5
–
PG sense Low signal,
6 - +24V supply voltage ( 0,7A max current ),
7
–
PG Null + signal,
8
–
PG Null
–
signal,
9
–
GND ( both for supply and analogue signals )
There are two channels available for vacuum gauges – one for any active gauge with
voltage output ( 0 .. 10V ), and one channel for Pirani gauge with Wheatstone bridge.
Please refer to Fig. 3.3.3 for connection examples
