1/1
Connecting a neutral gas purge
(ASM 180 TD only)
B 50
Edition 03 - May 97
Alcatel Vacuum Technology France - ASM 180 TD/TD+ - ASM 181 TD+ User’s Manual
Use
Neutral gas
supply
Connection
Note
- Used to accelerate the cleanup of the helium background
noise after detecting a significant leak.
- Make high sensitivity testing easier due to the reduction
and stabilization of the helium background noise.
The neutral gas supplied must have a helium concentration
less than or equal to 1 ppm.
Supply pressure: 1.4 ± 0.1 bar (absolute) (
≈
20 psia).
A quick connector is
located to the left at the
rear of the detector near
the LDS connector. The
corresponding male
connector (to be fitted
on the gas inlet tube) is
supplied in a plastic
bag with the detector.
The neutral gas purge connector is different than the inlet
hole connector. The latter can also be connected to a
neutral gas source to purge the inlet and anything connected
to it at the end of a cycle. The supply pressure of the gas
for the inlet vent must be atmospheric pressure 1,0
atm
absolute (
≈
14 psia).
+0,2
+0
N
2