Use of the "I" gas line option
For ASM 180 TD and ASM 180 TD+
5/11
Edition 03 - May 97
Alcatel Vacuum Technology France - ASM 180 TD/TD+ - ASM 181 TD+ User’s Manual
C 70
Installation
preparation
Equipment required
(in addition to the detector)
Flexible connection
components (3)
Helium spray
equipment (10)
Carrier gas source (8)
A carrier gas flow
adjustment device (7)
A reference leak (5)
E.g.: flexible stainless steel tubes of a diameter not greater
than10 mm so as not to increase the response time and
connection accessories compatible with the installation under test.
E.g.: helium cylinder with pressure relief valve, tube
and spray gun.
E.g.: helium-"free" nitrogen cylinder and pressure relief valve.
This source must be compatible with the cleanliness or purity
requirements within the installation at the time of the test.
The quickest method to adjust the gas flow is the mass flow
controller (Mass Flow Controler).
As an alternative, a manual micro-flow valve (DN16) can be
used.
According to usual connection procedures, stop valves (
6
) and
filters may be inserted.
used to "calibrate" the installation (response time for the furthest
point from the detector, ratio of actual leak / helium signal read
on the detector). ALCATEL offers reference leaks specially
designed for this application (without reservoir, with 1/4" VCR
connectors).
Different values of leaks are available (mbar.l/s):
1x10
-9
(Part No.
103371
), 1x10
-8
(Part No.
103372
),
1x10
-7
(Part No.
103373
), 1x10
-5
(Part No.
103374
).
He
N
2
1
2
3
4
3
5 6
6
8
9
9
10
7