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ASM 180 TD+ - ASM 181 TD+
Detector operating principle
A 21
Alcatel Vacuum Technology France - ASM 180 TD/TD+ - ASM 181 TD+ User’s Manual
Vacuum circuit
Pumping capacities
Edition 04 - September 97
1. Detector inlet port
2. Inlet vent valve
3. Vent filter connector
4. Roughing valve
5. Inlet pressure gauge (PI3C)
7. By-pass valve
8. Exhaust pressure gauge (PI1)
9. Exhaust valve
12. Roughing molecular drag pump
(MDP)
13. Detection valve
14. Calibrated leak module
15. Connector for long distance
sniffer
16. Sniffer valve
17. Hybrid turbomolecular pump
(PTM 5154)
18. Analyzer cell
20. Dry primary roughing pump
(CP20)
25 m
3
/h (15 cfm) roughing (dry primary pump CP20)
+ 10 l/s ( molecular drag pump MDP).
Helium pumping speed at inlet port: 4.4 l/s.
Test capacities
Short test cycle.
Quick response time.
Autocalibration with integrated calibrated leak.
16
15
1
3
2
4
13
9
17
20
18
14
7
5
8
12
12
a
b
c