Agilent Technologies 9191610, User Manual

Page: 87 / 98

Technical Information
Exchange of the High Voltage Feedthrough
5
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 87/98
Exchange of the High Voltage Feedthrough
CAUTION!
The high voltage feedthrough contains a ceramic insulator that can be damaged
if excessive force is applied in torque, in bending, or in tension. When installing
or removing the feedthrough, the applied torque should not exceed 2 Nm. Rotate
the feedthrough gently when making the threaded connection to avoid excessive
force.
1
Remove the 6 bolts of the Mini-ConFlat flange connection
(see Fig. 23).
2
Remove the cable connection disc.
3
Gently relieve the feedthrough from the metal gasket connection
and turn the feedthrough counterclockwise until it is completely
detached from the internal high voltage threaded connection.
4
Replace the feedthrough and the copper gasket, making sure that
the feedthrough is connected to the pumps internal connector.
Check that the feedthrough is not shorted.
5
Bake out the pump while it is operating, and leave it to cool
down; then verify that the base pressure is below 10
-9
mbar.
Figure 23 High voltage feedthrough connection