Agilent Technologies 9191610, User Manual

Page: 84 / 98

5 Technical Information
Operating Procedure
84/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Operating Procedure
1
Using a clean roughing pump, evacuate the system to a minimum
starting pressure as stated by the technical specification.
10
-6
mbar or less is recommended. To reach this pressure the use
of an oil free turbo-molecular roughing pump is recommended.
2
When starting an ion pump, a slight increase in vacuum pressure
is normal as the internal components are heated and outgassed.
If possible leave the roughing pump connected to the system
while starting the ion pump. This will make the startup faster
and easier.
3
Connect the control unit to a suitable power source and switch
the power on.
4
Switch on high voltage to the pump and observe the current and
voltage. Fastest starting is obtained using a high applied voltage,
7 kilovolts for example. The applied voltage may be reduced later
to optimize pumping and achieve the lowest vacuum pressure.
5
If started at 10
-4
mbar, the voltage will start at approximately
800 volts and increase to full voltage as the pump starts
operating. The current will start at several milliamps and slowly
decrease to microamps or nanoamps as low vacuum pressure is
achieved.
6
When first starting the pump, if the voltage decreases instead of
increasing, reduce the vacuum pressure then start the ion pump
again.
7
When the pump reaches its full operating voltage, you may close
the roughing valve.
8
If the pump does not start after 30 minutes of pumping, see the
section PUMP TROUBLESHOOTING.
9
Once the pump reaches its base pressure with stable voltage and
current, the ion pump may be baked at high temperature if
required per the section titled BAKEOUT OPERATION.
10
To stop the ion pump, simply switch off the high voltage. The
pump surfaces will continue to pump for a few minutes
depending on the system pressure.