Agilent Technologies 9191610, User Manual

Page: 62 / 98

5 Technical Information
Technical Specification
62/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Figures 4 to 11 show the pumping speed vs. pressure diagrams for
saturated and unsaturated pumps and the pressure vs. current
diagrams for the same pump.
The pumping speed of a newly regenerated (i.e. baked) sputter ion
pump decreases during operation until it reaches a stabilized level
known as "saturation" (nominal pumping speed). To saturate the
VacIon Plus 300 pumps, it normally requires an amount of gas equal
to 10 mbar-liters. Consequently, pumps can operate for extended
periods of time at low pressures in the non-saturated state, if they
are properly conditioned.