Agilent Technologies 9191610, User Manual

Page: 86 / 98

5 Technical Information
Maintenance
86/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Exchange of Pumping Element
Remove the internal high-voltage connections.
1
Remove the internal high-voltage connections.
2
Remove the element holding brackets.
3
Pull the element out of the pocket and remove it through the inlet
flange.
4
Clean the internal part of the pump with the appropriate solvent.
5
Put in the new element through the inlet flange. Make sure that
the element is fixed at its rear by the two press-formed buttons of
the element pocket, and at its front by the element holding clamp.
6
Reattach the high-voltage connections and test for continuity
from the feedthrough.
7
Place a blank flange over the pump inlet and leak-check it with a
leak detector.
8
Bake out the blanked off pump while it is operating, and leave it
to cool down; then verify that the base pressure is below
10
-9
mbar.