48
Chapter 4
User Maintenance
Wear Check
Measuring Impedance Shift
Measuring the impedance of the fixture with the upper and lower electrodes in contact
should check the electrode wear.
Normally, this check should be conducted under the following circumstances.
•
Once daily and before fixture compensation.
Required Tools
•
1.5-mm hex wrench (provided accessory)
•
Impedance measuring instrument (with 7-mm connector and calibrated)
CAUTION
The measuring instrument’s fixture compensation function should be set to OFF. Also,
other settings should be the same as those used for “Reference Value Acquisition”.
Procedure (Electrode Wear Check)
Step 1.
Clean the electrodes as described in “Cleaning” on page 41.
Step 2.
Set the measuring instrument and measure in the same way as for “Acquisition Procedure
(Electrode Wear Check Reference Value)” on page 46.
Step 3.
Record the Rs and Ls measured values as pass-fail in the “Check Sheet” (page 50).
Step 4.
If the result is unacceptable, replace both the upper and the lower electrode.
Procedure (Short Plate Wear Check)
Step 1.
Clean the short plate as described in “Cleaning” on page 41.
Step 2.
Set the measuring instrument and measure in the same way as for “Acquisition Procedure
(Short Plate Wear Check Reference Value)” on page 47.
Step 3.
Enter the Rs and Ls measured values as pass-fail in the “Check Sheet” (page 51).
Step 4.
If the result is unacceptable, replace the short plate.
Summary of Contents for 16196A
Page 7: ...6...
Page 18: ...17 2 Product Overview 2 Product Overview...
Page 37: ...36 Chapter3 Operation Connecting and Measuring DUTs...
Page 38: ...37 4 User Maintenance 4 User Maintenance...
Page 41: ...40 Chapter4 User Maintenance Overview Figure 4 1 Flowchart of User Maintenance...
Page 59: ...58 Chapter4 User Maintenance Assembling Check...
