Agilent Technologies 16196A, Operation And Service Manual

Page: 43 / 88

42 Chapter 4
User Maintenance
Cleaning
Cleaning Methods
Upper Electrode (Figure 4-2 (1)), Insulator Assembly (Figure 4-2 (4)), Open Plate,
Short Plate
Use the Cleaning Rod (Agilent parts number 5182-7586) for the cleaning.Use the white
rubber part of the cleaning rod to remove dirt from all contacting surfaces of the
above-mentioned parts. Be careful not to scratch or damage the parts when removing the
dirt.
Figure 4-3 Cleaning Rod
Dirt tends to adhere to the upper electrode and short plate parts in particular. Meticulous
cleaning of these parts is recommended.
CAUTION The front of the short plate has a sharp edge, so take adequate precautions when cleaning it.
CAUTION
Do not use a file or similar object to remove dirt, as this will affect measurement accuracy
and repeatability.
NOTE
If the dirt cannot be removed, replace the part. For replacement method, see the sections
"Replaceable Parts" and "Replacement Procedure".
Lower Electrode (Figure 4-2 (3))
Use the Cleaning Rod (Agilent parts number 5182-7586) for the cleaning.First use the push
ring to press down the insulator assembly. While maintaining this condition, use the white
rubber part of the cleaning rod to remove dirt from the contacting parts of the lower
electrode. Be careful not to scratch or damage the parts when removing the dirt.
Dirt tends to adhere to the lower electrode parts in particular. Meticulous cleaning of these
parts is recommended.
CAUTION Do not use a file or similar object to remove dirt, as this will affect measurement accuracy
and repeatability.
NOTE If the dirt cannot be removed, replace the part. For replacement method, see the sections
"Replaceable Parts" and "Replacement Procedure".