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4.2.2. Turning Mirrors

WARNING

: Never touch the reflective surface of a turning mirror. Turning mirror surfaces

are extremely delicate and can be easily damaged.

IMPORTANT

: Wear clean, powder-free gloves when you handle optical components.

The reflective surfaces of the turning mirrors are extremely sensitive and should only be cleaned when it
is absolutely necessary and only by experienced personnel. In many cases, minor imperfections in the
surface of the mirror can be less harmful than the surface damage caused by repeated cleaning.

To access the Turning Mirrors, the Exit Aperture Protective Window must first be removed.

TURNING MIRROR CLEANING PROCEDURE

1. Remove the four [QTY. 4] M6x1.0, 16 mm LG socket head cap screws that secure the exit aper-

ture protective window mounting bracket.

2. Remove the mounting bracket, protective window, and o-ring from the scan head.

WARNING

: The protective window is not secured in the mounting bracket. Make sure that it does

not fall out of the bracket.

3. Clean the Turning Mirrors. Follow the same cleaning procedure from

Section 4.2.1.

4. Replace the mounting bracket. Use the dowel pins to precisely locate the mounting bracket.

NOTE

: Make sure that the protective window and o-ring are in their correct positions.

5. Use the four [QTY. 4] M6 socket head cap screws that were removed in Step 1 to secure the

mounting bracket to the scan head.

Figure 4-1:

Exit Aperture Protective Window Mounting Bracket

AGV3D Hardware Manual

4.2.2. Turning Mirrors

www.aerotech.com

55

Summary of Contents for AGV3D Series

Page 1: ...Revision 2 00 AGV3D Three Axis Laser Scan Head HARDWARE MANUAL...

Page 2: ...spare or replacement parts To get help immediately contact a service office or your sales representative Include your customer order number in your email or have it available before you call This man...

Page 3: ...sions 31 2 3 Remove the Shipping Clamp 33 2 4 Securing the Scan Head to the Mounting Surface 35 2 5 Laser Beam Alignment 37 2 6 Air Requirements 40 2 7 Water Requirements 41 2 8 Changing the Dynamic F...

Page 4: ...Figure 2 2 AGV3D 30 Scan Head Dimensions 32 Figure 2 3 Top Cover Removal 33 Figure 2 4 Shipping Clamp Detail 34 Figure 2 5 Mounting Point Locations 36 Figure 2 6 Alignment Fixture 37 Figure 2 7 Air C...

Page 5: ...Specifications 36 Table 2 2 Mounting Specifications 36 Table 2 3 Recommended Beam Power Settings 38 Table 3 1 Motor and Feedback Connecter Pinouts X and Y Axis 47 Table 3 2 Mating Connector Part Numbe...

Page 6: ...This page intentionally left blank List of Tables AGV3D Hardware Manual 6 www aerotech com...

Page 7: ...obey the precautions that follow l Electrical installation must be done by qualified personnel l Before you do maintenance to the equipment disconnect the electrical power l Before you connect wires t...

Page 8: ...al shock and injury obey the precautions that follow l Only trained operators should operate this equipment l Use this product only in environments and operating conditions that are approved in this m...

Page 9: ...location where laser radiation is emitted Brief descriptions of each of the various radiation classes are presented in the table below Note that in addition to the dangers of radiation lasers can pose...

Page 10: ...th a laser device that can generate a sufficiently intense beam a laser area will be produced that includes the aiming volume as well as the reflections from all objects that can be exposed to the rad...

Page 11: ...appropriate shutter as per any and all applicable regulations in order to prevent unwanted emission of the laser beam Place the beam shutter between the laser source and the scan head refer to Figure...

Page 12: ...This page intentionally left blank Laser Shutter AGV3D Hardware Manual 12 www aerotech com...

Page 13: ...rvice until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and wi...

Page 14: ...This page intentionally left blank EU Declaration of Incorporation AGV3D Hardware Manual 14 www aerotech com...

Page 15: ...iginal size The scan head enclosure is fully sealed featuring cover glass and gaskets over both the input and exit apertures to make sure that no dust or particles can infiltrate the enclosure and cau...

Page 16: ...Figure 1 2 Standard AGV3D Chapter 1 Overview AGV3D Hardware Manual 16 www aerotech com...

Page 17: ...ion 2 7 WC Water cooling Plate Optional MP1 Rear Mounting Plate MP2 Bottom Mounting Plate Integration Required TAS Integration Test as system Testing integration and documentation of a group of compon...

Page 18: ...to 2 000 m 0 ft to 6 562 ft above sea level Contact Aerotech if your specific application involves use above 2 000 m or below sea level Vibration Use the system in a low vibration environment Excessiv...

Page 19: ...for a minimum of four hours prior to performing any critical operations with the AGV3D Application of the feedback power supply can raise the temperature of the galvano motors resulting in a transient...

Page 20: ...V 6 5 m s at 1000x1000 mm FOV 65 m s Z Focus 500 mm s 2 1 9 m s at 160 mm working distance 15 m s at 500 mm working distance 50 m s at 1000 mm working distance Stability Long Term Drift 4 Galvo Scanne...

Page 21: ...000 hours NOTE All angles are optical unless otherwise noted All specifications are per axis unless noted 1 Contact Aerotech to inquire about additional wavelengths 2 As measured at the focusing appa...

Page 22: ...91 8 102 3 700 mm x 700 mm 907 mm 53 8 60 0 102 7 114 5 106 0 118 3 800 mm x 800 mm 1045 mm 61 0 68 1 116 5 130 1 120 3 134 3 1000 mm x 1000 mm 1320 mm 75 4 84 4 144 1 161 2 148 8 166 4 1550 nm 9 3 m...

Page 23: ...69 8 64 1 71 7 700 mm x 700 mm 907 mm 40 5 45 6 72 6 81 4 74 5 83 5 800 mm x 800 mm 1045 mm 46 5 52 82 8 93 0 84 9 95 3 1000 mm x 1000 mm 1320 mm 59 0 67 0 103 1 116 5 106 0 119 1 1550 nm 9 3 m 10 6...

Page 24: ...m 461 mm WD 375 mm x 375 mm 461 mm WD F2 Min 175 mm x 175 mm 186 mm WD Max 1000 mm x 1000 mm 1320 mm WD 1 1550 nm 9 3 m 10 6 m F1 Min 100 mm x 100 mm 83 mm WD Max 350 mm x 350 mm 427 mm WD 325 mm x 32...

Page 25: ...gure 1 4 AGV3D 20 X Y Axis Linear Acceleration vs Working Distance Figure 1 5 AGV3D 30 X Y Axis Linear Acceleration vs Working Distance AGV3D Hardware Manual 1 3 Basic Specifications www aerotech com...

Page 26: ...alues are generally representative of system performance for all wavelength options If precise values for an alternate wavelength are required contact the factory Figure 1 6 AGV3D Z Axis Linear Accele...

Page 27: ...iguration Refer to the AGV3D User Guide to configure the motion software Any PC included with the system from the factory will already be configured AGV3D Hardware Manual 1 4 Software Configuration ww...

Page 28: ...This page intentionally left blank 1 4 Software Configuration AGV3D Hardware Manual 28 www aerotech com...

Page 29: ...act Aerotech Global Technical Support DANGER Use of this product increases the risk of exposure to visible and or invisible laser radiation l Do not stare into the laser beam put your body parts in th...

Page 30: ...d to its mounting surface to protect the optics IMPORTANT Wear clean powder free gloves when you handle optical components Carefully remove the AGV3D from its protective shipping container Gently set...

Page 31: ...2 2 Dimensions Figure 2 1 AGV3D 20 Scan Head Dimensions AGV3D Hardware Manual 2 2 Dimensions www aerotech com 31...

Page 32: ...Figure 2 2 AGV3D 30 Scan Head Dimensions 2 2 Dimensions AGV3D Hardware Manual 32 www aerotech com...

Page 33: ...er Removal 2 Carefully lift up the top cover from the front to access the shipping clamp NOTE The top cover can not be completely removed because there are cables attached to the underside of it WARNI...

Page 34: ...you reattach the cover NOTE The top cover should be flush with the enclosure Carefully move any cables that interfere with the position of the top cover 6 Attach the top cover with the four QTY 4 M3 s...

Page 35: ...ed residue and clean if necessary Use precision flatstones on the mounting surface to remove any burrs or high spots Clean the mounting surface with a lint free cloth and acetone or isopropyl alcohol...

Page 36: ...Size Right Side 4 M6x1 9 mm LG Rear Side 4 M6x1 9 mm LG Bottom 4 M6x1 9 mm LG Table 2 2 Mounting Specifications Specification Parallelism to Workpiece 50 m over 100 mm Mounting Surface Flatness 25 m o...

Page 37: ...laser safety precautions l Do not stare into the laser beam put your body parts in the laser area or expose yourself to reflections from powerful beams l Wear certified laser safety eye protection l...

Page 38: ...hat was supplied with the laser 4 Adjust the position of the laser source until the beam is concentric with the marked circles on the front target of the alignment fixture 5 If the beam hits the rear...

Page 39: ...ew sheet of paper for each test until the laser beam is correctly centered on the target 5 Remove the front target from the alignment fixture 6 Determine if the beam is aligned with the pinhole on the...

Page 40: ...kPa to 586 kPa 75 psi to 85 psi is required Gas must be delivered via a polyurethane air hose with an outer diameter of 4 mm Unless otherwise specified a gas flow rate of 20 SLPM standard liters per...

Page 41: ...le rubber If distilled water cannot be used contact the factory to discuss the specifics of your application If the WC water cooling option was purchased use this option to cool the galvo motors and t...

Page 42: ...rt this procedure 1 Loosen but do not remove the four QTY 4 M4x0 7 14 mm LG socket head cap screws that are located in the slots on the bottom side of the AGV3D enclosure Figure 2 9 Dynamic Focusing M...

Page 43: ...tighten the M4 socket head cap screws that were loosened in Step 2 l Alternate between the screws l Tighten the screws to a torque of 30 in lb 6 Use the AGV3D setup programs to update the parameter se...

Page 44: ...clean powder free gloves when you handle optical components The user is responsible for supplying both the F Theta lens and a lens adapter Contact the factory for assistance 2 9 Using an F Theta Lens...

Page 45: ...g conditions that are approved in this manual Electrical installation requirements will depend on the ordered product options Installation instructions in this section are for AGV3D stages equipped wi...

Page 46: ...factory completely wired and assembled The X and Y axis galvo motors produce dual analog encoder feedback signals The Z axis motor produces single analog encoder feedback signals The Primary X Y and Z...

Page 47: ...Motor 14 SIN1 Encoder Sine 1 15 COS1 Encoder Cosine 1 16 5V Common Ground 17 SIN2 Encoder Sine 2 18 COS2 Encoder Cosine 2 19 CCW LMT The limit signal that shows the maximum permitted machine travel in...

Page 48: ...tor 14 SIN Encoder Sine 15 COS Encoder Cosine 16 Common ground 17 Reserved 18 Reserved 19 Reserved 20 MRK Encoder Marker 21 Common ground 22 Common ground 23 Signal Shield Connection 24 Motor 25 Motor...

Page 49: ...access to the AGV3D when it is connected to a power source AGV3D scan heads are wired and assembled at the factory Contact your Aerotech representative if you have any questions on system configuratio...

Page 50: ...Figure 3 2 X and Y Axis Motor and Feedback Wiring 3 2 Motor and Feedback Wiring AGV3D Hardware Manual 50 www aerotech com...

Page 51: ...Figure 3 3 Z Axis Motor and Feedback Wiring AGV3D Hardware Manual 3 2 Motor and Feedback Wiring www aerotech com 51...

Page 52: ...4 Inductance 170 H 1 12 mH Maximum Bus Voltage 80 V 80 V Number of Poles 2 N A Table 3 7 AGV3D 30 Motor and Feedback Specifications Feedback Specifications X and Y Motors Z Motor Supply Voltage 5 V Su...

Page 53: ...manual The internal optical components are precisely aligned at the factory in a clean environment to achieve high performance Removal of any components will significantly compromise performance and...

Page 54: ...atively soft substances and incorrect cleaning techniques will result in surface damage and drastically reduced component lifetime The cleaning procedure for the AGV3D is intended to help prolong the...

Page 55: ...G PROCEDURE 1 Remove the four QTY 4 M6x1 0 16 mm LG socket head cap screws that secure the exit aper ture protective window mounting bracket 2 Remove the mounting bracket protective window and o ring...

Page 56: ...for tuning instructions Encoder signals not optimized Refer to the controller documentation for encoder tuning instructions Reduction in power as the laser beam passes through the scan head Optical su...

Page 57: ...zation RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerot...

Page 58: ...al rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site...

Page 59: ...Appendix B Revision History Revision Description 2 00 General update 1 01 Updated Section 1 3 Basic Specifications 1 00 New Manual AGV3D Hardware Manual Appendix B Revision History www aerotech com 59...

Page 60: ...This page intentionally left blank Appendix B Revision History AGV3D Hardware Manual 60 www aerotech com...

Page 61: ...tion 45 EN 60204 1 2010 13 EN ISO 12100 2010 13 EU 2015 863 13 F Feedback Specifications 52 field service 53 H Handling the Scan Head 30 Humidity 18 I Inspection 53 54 Inspection Schedule 53 isopropyl...

Page 62: ...age 30 stage stabilizing 30 T Table of Contents 3 Temperature Effects 19 Tuning 46 Turning Mirrors 55 U Unpacking and Handling the Scan Head 30 V Vibration 18 W Warranty and Field Service 57 Water Req...

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