Aerotech AGV3D Series, Hardware Manual

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Table 1-4: AGV3D Series Specifications (continued)
AGV3D-20 AGV3D-30
Mechanical Specifications
Axes 3 total: Spot positioning (X,Y); Focusing (Z)
Accuracy
Galvo Scanners 50 µrad pk-pk
Z-Focus 0.5 µm
Repeatability
Galvo Scanners 0.4 µrad rms
Z-Focus 0.15 µm
Dither (Minimum
Incremental Motion)
(5)
Galvo Scanners < 0.4 µrad rms
Z-Focus
0.003 μm
(2)
0.05 μm at 160 mm working distance
0.25 μm at 500 mm working distance
0.8 μm at 1000 mm working distance
Cooling
(6)
Air cooling (-AC option);
Water cooling (-WC option)
Weight 10.5 kg 11.2 kg
Material Anodized aluminum
Mean Time Before Failure (MTBF) 20,000 hours
NOTE: All angles are optical unless otherwise noted. All specifications are per axis unless noted.
(1) Contact Aerotech to inquire about additional wavelengths.
(2) As measured at the focusing apparatus.
(3) The processing speed is dependent on the allowable tracking error. It is achievable with < 2% velocity error over
continuous velocity portion of the move.
(4) After an initial three hour warm-up, expect an ambient temperature variation of < ±0.5°.
(5) Without -AC air cooling option.
(6) Air specifications: Nitrogen must be 99.99% pure and filtered to 0.25 μm. Compressed air must be filtered to 0.25 μm,
dry to 0º F dew point and oil free.
(7) The working distance is measured from the bottom surface of the scan head.
AGV3D Hardware Manual 1.3. Basic Specifications
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