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GB
01244
- Edition
03
- September
04
1/2
A 800
ASM 182 / 192 TD+
Technical characteristics
Measurement range
(Helium)
Crossover pressure
(at inlet)
mbar.l/s
Pa.m
3
/s
mbar
Pa
Gross leak test mode
1.10
-8
to 1.10
-1
1.10
-9
to 1.10
-2
6
600
High sensitivity test mode
1.10
-11
to 3.10
-4
1.10
-12
to 3.10
-5
2.10
-2
2
Sniffing test mode
1.10
-7
to 1.10
-1
1.10
-8
to 1.10
-2
sniffer probe at atm. pressure
Response time (Inlet port blanked off)
< 0.1 s
Helium pumping speed:
At inlet port
4.4 l/s
Roughing (primary) pump characteristics:
Hybrid (primary) pump pumping speed (in air)
25 m
3
/h (15 cfm) + 10 l/s
Hybrid turbomolecular pump characteristics:
Hybrid turbomolecular pump pumping speed (in air)
110 l/s
Hybrid turbomolecular pump exhaust pressure safety limit
6 mbar
Analyzer cell (Spectro):
Analyzer cell design
self protected 180° magnetic deviation mass spectrometer
Analyzer cell filament
2 tungsten filaments
Analyzer cell sensitivity
3.10
-4
A/mbar
Emission current range
0.2 to 2 mA
Air pumping speed
110 l/s
Helium pumping speed
30 l/s
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+