3 Automatic Needle Alignement
3-4
position setting failure during manual needle height
alignment. Finding a needle not to be searched
stops
the next processing by auto focusing after DATA
IN.
When touching “
Needle Height Settings
”, [Needle
Height Settings] parameters will appear.
Method of Needle Height Setting
Select “Auto” to perform needle height
determination. (This setting does not exist in the
device parameter.) If “Auto” is selected, the
screen changes as shown in the figure below.
“Manual” is used to determine the contact height
using a microscope after measuring the needle
height through use of a needle tip detection
camera. (The case where the chuck height is
manually adjusted by electrically checking the
contact status using a tester, is included.)
Upper Limit of <Z-UP> switch
This parameter is used to specify the increase
limit when setting the contact height by manually
increasing the chuck height after measuring the
needle tip height using a needle detection camera.
“Contact Position” means the contact height
measured in the image processing.
Feedback to Device Parameter?
“Needle Alignment Fine Adjustment Data X/Y”,
“Needle Alignment Die Coordinates X/Y” in the
“Needle Alignment Data Settings” menu are
re-written by the values optimized during the
automatic needle alignment processing. However,
if “Yes” is set here, the re-written data is saved in
HD with device data. And these data will be used
as device data since then. If “No” is selected,
these parameters in the device data remains the
same values that it was. Note that “Needle
Alignment Fine Adjustment Data X/Y” is limited
within ±50 µm with the automatic re-writing set to
“Yes”. However, if the automatic re-writing is set to
“No”, the limit does not exist (only warning exist).
Method of Needle Height Setting
If “Auto” is selected, the parameter for the
following automatic needle height determination is
displayed.
Assort. of Auto Needle Height Setting
With “TTL”, the contact height is determined by
increasing the chuck height until the needle tip die
pad contact confirmation signal is transmitted from
the TTL interface tester.
With “GP-IB”, the chuck increases its height in
accordance with the chuck height increase
command from the tester, and the contact height
is determined by the needle tip die pad contact
confirmation command.
“Needle Tip Focus Position” determines the
contact height by the needle height measured by
