2 Lot Processing
2.1 Screen Display and Operations Prior to Starting Lot
Processing .....................................................................................2-2
2.1.1
Switching the display with the <Screen Change> button ...........2-3
2.1.2 Operation settings ...........................................................................2-4
2.2
Device Data Switching........................................................2-5
2.2.1
Saving/deleting device data............................................................2-7
2.3
Probe Card Replacement ...................................................2-8
2.4 Wafer
Alignment................................................................ 2-11
2.4.1 Manual
registration of models .....................................................2-13
2.4.2. Manual
Alignment ..........................................................................2-15
