APPENDIX Prober Status Display
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APPENDIX
Prober Status Display
Operation statuses for UF200R/UF190R are categorized into the following five groups.
(1) Normal
operation
E.g. Performing alignment, probing.
(2) Warning condition : Probing is continued.
E.g. Cleaning unit usage count over-limit.
(3) Operator call
: Operation paused to await assistance by operator.
E.g. Awaiting data-in operation.
(4)
Alarm stop
: System stopped by an alarm while in normal operation.
(Can be recovered by an operator)
(5) System error
: System stopped by an alarm due to prober malfunction.
If the system cannot be reset and recovered by recycling the power, the system must
be repaired.
In the case of an alarm stop (group 4), error messages will be displayed on the screen. Check
the cause of the error stop and press the ALARM OFF key. The screen will return to the prober
status, wafer map, lot information or loader status display. Perform the necessary recovery
operation.
Alarm lamps, buzzer and on-screen messages indicate the various operation statuses as
described in the following table.
Condition
Alarm lamps
Buzzer
Message indication
Nornal operation
Warning condition
Operator call
Alarm-stop
System error
Green lamp lighting
Status by white characters
Orange lamp slow blinking
Low tone
Yellow warning message
(The green lamp holds on at a
warning condition that has
happened in the normal operation.)
After the operator's
confirmation
Orange lamp turned off
Stop
Stop
Stop
Low/high tone
High tone
Hight tone
Orange lamp blinking
Red lamp blinking
Red lamp blinking fast
Orange lamp lit up
Red/orange lamps lit up
Yellow prompt
Red error message on the
message indicating screen;
with the error code starting
from "E"
After the operator's
confirmation
After the operator's
confirmation
Red error message on the
message indicating screen;
with the error code starting
from "S"