2 Lot Processing
2-1
2 Lot Processing
This chapter explains the following procedures for the preparation and starting of wafer lot
processing, which takes place after the completion of prober startup.
1) Screen display and operations prior to starting lot processing
2) Switching of device data
3) Replacement and management of prober cards
4) Wafer alignment
For needle alignment procedures on a system equipped with an automatic alignment function,
refer to Chapter 3. For information on wafer maps, refer to Chapter 4.
