1 Operation Points and Startup
1-8
1.7 Loader
Unit
The cassette elevator in the loader unit supports 5-, 6- and 8-inch cassettes.
In UF200R, processing of new cassettes and locking/unlocking of the inspection tray are
performed with buttons on the display/touch panel.
Touch the “NEW CST” button to process new cassettes, and the “Lock/Unlock” button to
lock/unlock the inspection tray.
To set a wafer onto the inspection tray, or to remove the wafer from the inspection tray, first
unlock the inspection tray by touching the “Lock/Unlock” button. Then, pull out the tray as
shown below, and set or remove the wafer.
