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6 Utility Functions
6-1
6 Utility Functions
Utility functions are supplementary functions provided for improved efficiency of the prober.
They can be used when the prober is in an idle state (i.e. when the prober is stopped and no
clear of errors).
In the idle state, touch the <Utility> button at the upper
right of the Wafer Map, Prober Status or Lot Information
screen to switch to the [Utility] menu page 1/3.
On the menu screen, touch a function selection area to
display the operation screen for the corresponding utility
function.
Depending on the operation level (Operator, Engineer,
Manager or System), some functions may not be
shown. Touch the <System Mode Change> button to
switch the level as necessary.